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Description
  • In this article the theoretical background and some results of the scanning thermal microscopy analysis of artifical structures such as microchip surfaces and solar cell contacts are presented. It is shown that at the absence of surface roughness the SThM can be used to obtain reliable material contrast images. However, roughness and other topographical features can influence the thermal data in a strong way. It is illustrated that this effect can be partially removed by using neural network approach for modelling the thermal signal using the topography data. The illustration of this approach is presented in the analysis of geometry of the examples selected in this article.
  • In this article the theoretical background and some results of the scanning thermal microscopy analysis of artifical structures such as microchip surfaces and solar cell contacts are presented. It is shown that at the absence of surface roughness the SThM can be used to obtain reliable material contrast images. However, roughness and other topographical features can influence the thermal data in a strong way. It is illustrated that this effect can be partially removed by using neural network approach for modelling the thermal signal using the topography data. The illustration of this approach is presented in the analysis of geometry of the examples selected in this article. (en)
Title
  • Scanning thermal microscopy - theory and applications
  • Scanning thermal microscopy - theory and applications (en)
skos:prefLabel
  • Scanning thermal microscopy - theory and applications
  • Scanning thermal microscopy - theory and applications (en)
skos:notation
  • RIV/00216224:14310/05:00013549!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(FT-TA/094), Z(AV0Z20410507), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika
  • 11-12
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 541913
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00013549
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Scanning thermal microscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [0B28A02B6FF1]
http://linked.open...i/riv/nazevZdroje
  • Jemná mechanika a optika
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 50
http://linked.open...iv/tvurceVysledku
  • Buršík, Jiří
  • Klapetek, Petr
  • Ohlídal, Ivan
http://linked.open...n/vavai/riv/zamer
issn
  • 0447-6441
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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