About: Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper the theoretical analysis of the correctness of applying the effective medium approximation (EMA) at the ellipsometric studies of rough surfaces is presented. Within this analysis the Rayleigh-Rice theory (RRT) is used to calculate the simulated ellipsometric data of various slightly randomly rough surfaces. This simulated data are treated using the least-squares method for finding the values of the parameters characterizing the rough surfaces within the EMA, i.e. the values of thickness and packing density factor describing a fictitious (effective) thin films replacing these surfaces within the EMA. It is shown that the EMA could be used to interprete the ellipsometric data of the rough surfaces in a correct way if their roughness only contains the high spatial frequencies. For the low spatial frequencies it is shown that the influence of the surface roughness on the ellipsometric quantities is small in contrast to its influence on the reflectance. In this paper the theoretical analysis of the correctness of applying the effective medium approximation (EMA) at the ellipsometric studies of rough surfaces is presented. Within this analysis the Rayleigh-Rice theory (RRT) is used to calculate the simulated ellipsometric data of various slightly randomly rough surfaces. This simulated data are treated using the least-squares method for finding the values of the parameters characterizing the rough surfaces within the EMA, i.e. the values of thickness and packing density factor describing a fictitious (effective) thin films replacing these surfaces within the EMA. It is shown that the EMA could be used to interprete the ellipsometric data of the rough surfaces in a correct way if their roughness only contains the high spatial frequencies. For the low spatial frequencies it is shown that the influence of the surface roughness on the ellipsometric quantities is small in contrast to its influence on the reflectance. (en)
Title	Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces (en)
skos:prefLabel	Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces (en)
skos:notation	RIV/00216224:14310/05:00013547!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(FT-TA/094), Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Franta, Daniel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	515863
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00013547
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Roughness; Ellipsometry; EMA; RRT (en)
http://linked.open.../riv/klicoveSlovo	RRT EMA Ellipsometry Roughness
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[054FD68654B0]
http://linked.open...i/riv/nazevZdroje	Optics Communications
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	*Development of the methods for characterization of solid state surfaces.
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	248
http://linked.open...iv/tvurceVysledku	Franta, Daniel Ohlídal, Ivan
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
issn	0030-4018
number of pages	9 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces

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