About: Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures     Goto   Sponge   NotDistinct   Permalink

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Description
  • The composition of films, deposited from hexamethyldisiloxane/oxygen mixtures was studied by FTIR transmittance measurements, Rutherford backscattering method (RBS) and elastic recoil detection (ERD). Films were characterized by the ellipsometry, the morphology of the film surfaces was studied by SEM and the mechanical properties of films were characterized by Vickers indentation technique.
  • The composition of films, deposited from hexamethyldisiloxane/oxygen mixtures was studied by FTIR transmittance measurements, Rutherford backscattering method (RBS) and elastic recoil detection (ERD). Films were characterized by the ellipsometry, the morphology of the film surfaces was studied by SEM and the mechanical properties of films were characterized by Vickers indentation technique. (en)
Title
  • Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures
  • Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures (en)
skos:prefLabel
  • Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures
  • Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures (en)
skos:notation
  • RIV/00216224:14310/00:00003105!RIV/2002/MSM/143102/N
http://linked.open.../vavai/riv/strany
  • 448
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(VS96084), Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 713499
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/00:00003105
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Thin Films, PECVD, Hexamethyldisiloxane, RF discharge, RBS, ERD, FTIR, Polycarbonate (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [0302A8A9902B]
http://linked.open...v/mistoKonaniAkce
  • Miskolc - Lillafüred, Hungary
http://linked.open...i/riv/mistoVydani
  • Miskolc - Lillafüred, Hungary
http://linked.open...i/riv/nazevZdroje
  • Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Buršíková, Vilma
  • Janča, Jan
  • Macková, Anna
  • Zajíčková, Lenka
  • Peřina, Vratislav
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • European Physical Society
http://localhost/t...ganizacniJednotka
  • 14310
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