About: Metrological SPM with positioning controlled by green light interferometry

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Laser interferometry seems to be a solution not only due to its direct traceability to the fundamental etalon of length but also the incremental interferometer in its fringe counting mode gives an excellent dynamic range limited only by the fluctuations of the refractive index of air and offers nanometer or even subnanometer resolution over large range. We concentrated onto a small range flexture three-axis nanopositioning stage equipped with closed-loop motion control with capacitive sensors embedded in a frame with six-axes interferometric system supplied from a stabilized single-frequency frequency doubled 532 nm Nd:YAG laser. Laser interferometry seems to be a solution not only due to its direct traceability to the fundamental etalon of length but also the incremental interferometer in its fringe counting mode gives an excellent dynamic range limited only by the fluctuations of the refractive index of air and offers nanometer or even subnanometer resolution over large range. We concentrated onto a small range flexture three-axis nanopositioning stage equipped with closed-loop motion control with capacitive sensors embedded in a frame with six-axes interferometric system supplied from a stabilized single-frequency frequency doubled 532 nm Nd:YAG laser. (en)
Title	Metrological SPM with positioning controlled by green light interferometry Metrological SPM with positioning controlled by green light interferometry (en)
skos:prefLabel	Metrological SPM with positioning controlled by green light interferometry Metrological SPM with positioning controlled by green light interferometry (en)
skos:notation	RIV/00177016:_____/09:#0000356!RIV11-MSM-00177016
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(GA102/09/1276), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Klapetek, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	326023
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/09:#0000356
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	laser interferometry (en)
http://linked.open.../riv/klicoveSlovo	laser interferometry
http://linked.open...ontrolniKodProRIV	[D7C672DCF73C]
http://linked.open...v/mistoKonaniAkce	Nürtinger
http://linked.open...i/riv/mistoVydani	Heidelberg
http://linked.open...i/riv/nazevZdroje	Fringe 2009 - 6th International Workshop on Advanced Optical Metrology
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of Modern Optics The research of methods of diagnostics of gauge blocks for precicion engineering *Investigetion of dynamics of the laser welding process and its control Safe optical wireless links for municipal networks System of laser interferometers for nanometrology of lenghts. Methods for determination of the refractive index of air with optical resonators Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Klapetek, Petr Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-09-13 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Springer-Verlag
https://schema.org/isbn	978-3-642-03050-5
is http://linked.open...avai/riv/vysledek of	Metrological SPM with positioning controlled by green light interferometry Metrological SPM with positioning controlled by green light interferometry

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