About: Local probe microscopy with interferometric monitoring of the stage nanopositioning

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present a system of positioning and interferometric monitoring of a sample position for measurements and calibration in the nanoscale in metrology. The positioning is based on a three-axis stage which allows replacing scanning by the probe of an atomic force microscope with a system with full interferometric displacement measurement. A stage with 200 μm 200 μm of horizontal travel extends also the microscope range. The stage allows positioning with sub-nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring. We present a system of positioning and interferometric monitoring of a sample position for measurements and calibration in the nanoscale in metrology. The positioning is based on a three-axis stage which allows replacing scanning by the probe of an atomic force microscope with a system with full interferometric displacement measurement. A stage with 200 μm 200 μm of horizontal travel extends also the microscope range. The stage allows positioning with sub-nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring. (en)
Title	Local probe microscopy with interferometric monitoring of the stage nanopositioning Local probe microscopy with interferometric monitoring of the stage nanopositioning (en)
skos:prefLabel	Local probe microscopy with interferometric monitoring of the stage nanopositioning Local probe microscopy with interferometric monitoring of the stage nanopositioning (en)
skos:notation	RIV/00177016:_____/09:#0000355!RIV11-MSM-00177016
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(IAA200650504), P(LC06007), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	8
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Klapetek, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	323985
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/09:#0000355
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	interferometry (en)
http://linked.open.../riv/klicoveSlovo	interferometry
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[3227B3A36442]
http://linked.open...i/riv/nazevZdroje	Measurement Science and Technology
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of Modern Optics The research of methods of diagnostics of gauge blocks for precicion engineering *Investigetion of dynamics of the laser welding process and its control Safe optical wireless links for municipal networks System of laser interferometers for nanometrology of lenghts. Methods for determination of the refractive index of air with optical resonators Precision of the optical frequency of lasers stabilized on saturated absorption in iodine
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	20
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír
http://linked.open...ain/vavai/riv/wos	2,67514E+11
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	0957-0233
number of pages	6 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Local probe microscopy with interferometric monitoring of the stage nanopositioning Local probe microscopy with interferometric monitoring of the stage nanopositioning

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