About: Green Light Interferometry for Metrological SPM Positioning

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present an arrangement for dimensional metrology of nanostructures based on various techniques of scanning probe microscopy (SPM) combined with a precision positioning of a sample. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. Traceability of the position monitoring and control of the scanning stage is ensured by full six axes interferometric displacement measurements. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine. We present an arrangement for dimensional metrology of nanostructures based on various techniques of scanning probe microscopy (SPM) combined with a precision positioning of a sample. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. Traceability of the position monitoring and control of the scanning stage is ensured by full six axes interferometric displacement measurements. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine. (en)
Title	Green Light Interferometry for Metrological SPM Positioning Green Light Interferometry for Metrological SPM Positioning (en)
skos:prefLabel	Green Light Interferometry for Metrological SPM Positioning Green Light Interferometry for Metrological SPM Positioning (en)
skos:notation	RIV/00177016:_____/09:#0000354!RIV11-MSM-00177016
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(GA102/09/1276), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Klapetek, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	316692
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/09:#0000354
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	scanning probe microscopy (en)
http://linked.open.../riv/klicoveSlovo	scanning probe microscopy
http://linked.open...ontrolniKodProRIV	[E64A71B07D9D]
http://linked.open...v/mistoKonaniAkce	Tokyo
http://linked.open...i/riv/mistoVydani	Tokyo
http://linked.open...i/riv/nazevZdroje	MOC'09 - 15th Microoptics Conference
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of Modern Optics The research of methods of diagnostics of gauge blocks for precicion engineering *Investigetion of dynamics of the laser welding process and its control Safe optical wireless links for municipal networks System of laser interferometers for nanometrology of lenghts. Methods for determination of the refractive index of air with optical resonators Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Klapetek, Petr Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-10-25 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Microoptics Group (OSJ/JSAP)
https://schema.org/isbn	978-4-86348-037-7
is http://linked.open...avai/riv/vysledek of	Green Light Interferometry for Metrological SPM Positioning Green Light Interferometry for Metrological SPM Positioning

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