About: Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma.     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • Annotation not available
  • Annotation not available (en)
Title
  • Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma.
  • Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma. (en)
skos:prefLabel
  • Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma.
  • Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma. (en)
skos:notation
  • RIV/68378271:_____/97:02980342!RIV/2001/AV0/A02001/N
http://linked.open.../vavai/riv/strany
  • 1999
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GV106/96/K245)
http://linked.open...iv/cisloPeriodika
  • 4
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Musil, Jindřich
  • Mišina, Martin
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 808318
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/97:02980342
http://linked.open...riv/jazykVysledku
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [01492068EE90]
http://linked.open...i/riv/nazevZdroje
  • Journal of Vacuum Science and Technology. A
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 15
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Mišina, Martin
  • Hovorka, D.
issn
  • 0734-2101
number of pages
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 111 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software