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  • In the scanning electron microscope (SEM), the secondary electrons (SE) are usually detected by the Everhart-Thornley (ET) type detector, using a weak electrostatic field to attract low energy SE let us call it the standard system. This principle is employed for more than forty years. Modern SEMs achieve their improved image resolution by allowing the strong magnetic field of the objective lens (OL) to penetrate to the specimen surface (so called immersion system). Two SE detectors are usually used in this case: one is below the OL just as the standard ET detector (lower detector) and the other is positioned above the OL (upper detector). The final contrast of SE images for the same specimen varies with the energy and angular sensitivity of the detectors, connected with specific distributions of the electrostatic and magnetic fields in the specimen region.
  • In the scanning electron microscope (SEM), the secondary electrons (SE) are usually detected by the Everhart-Thornley (ET) type detector, using a weak electrostatic field to attract low energy SE let us call it the standard system. This principle is employed for more than forty years. Modern SEMs achieve their improved image resolution by allowing the strong magnetic field of the objective lens (OL) to penetrate to the specimen surface (so called immersion system). Two SE detectors are usually used in this case: one is below the OL just as the standard ET detector (lower detector) and the other is positioned above the OL (upper detector). The final contrast of SE images for the same specimen varies with the energy and angular sensitivity of the detectors, connected with specific distributions of the electrostatic and magnetic fields in the specimen region. (en)
  • Sekundární elektrony (SE) jsou v rastrovacím elektronovém mikroskopu (REM) obvykle detekovány pomocí Everhartova-Thornleyho (ET) detektoru, jehož slabé elektrostatické pole přitahuje nízko energiové SE; takový systém nazveme standardní. Tento systém se používá více než 40 let. Moderní REM dosahují zlepšení obrazového rozlišení vlivem silného magnetického pole objektivové čočky, které proniká do oblasti vzorku (tzv. imerzní systém). V tomto případě se obvykle používají dva SE detektory: jeden umístěný pod objektivem (spodní detektor) a druhý se nachází uvnitř objektivu (horní detektor). Výsledný kontrast obrazu sekundárních elektronů stejného vzorku se mění s energiovou a úhlovou citlivostí detektoru, v závislosti na rozložení elektrostatického a magnetického pole v okolí vzorku. Studium sběrové účinnosti jednotlivých detektorů je nezbytné pro správnou interpretaci pozorovaného kontrastu. (cs)
Title
  • Detection Strategies for Collection of Secondary Electrons in SEM
  • Detection Strategies for Collection of Secondary Electrons in SEM (en)
  • Detekční strategie pro sběr sekundárních elektronů v REM (cs)
skos:prefLabel
  • Detection Strategies for Collection of Secondary Electrons in SEM
  • Detection Strategies for Collection of Secondary Electrons in SEM (en)
  • Detekční strategie pro sběr sekundárních elektronů v REM (cs)
skos:notation
  • RIV/68081731:_____/07:00092207!RIV08-GA0-68081731
http://linked.open.../vavai/riv/strany
  • 91;92
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/05/2327), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 416566
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/07:00092207
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • detection; secondary electrons; SEM (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [35047A369DC2]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Prague
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 8th Multinational Congress on Microscopy
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Konvalina, Ivo
  • Hovorka, Miloš
  • Müllerová, Ilona
  • Mika, Filip
  • Wandrol, Petr
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Czechoslovak Microscopy Society
https://schema.org/isbn
  • 978-80-239-9397-4
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