About: Pressure sensor with SI.sub.3./sub.N.sub.4./sub. diaphragm and optoelectronic sensing.     Goto   Sponge   NotDistinct   Permalink

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Description
  • Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark's position is sensed using position sensing device - photo lateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.
  • Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark's position is sensed using position sensing device - photo lateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface. (en)
Title
  • Pressure sensor with SI.sub.3./sub.N.sub.4./sub. diaphragm and optoelectronic sensing.
  • Pressure sensor with SI.sub.3./sub.N.sub.4./sub. diaphragm and optoelectronic sensing. (en)
skos:prefLabel
  • Pressure sensor with SI.sub.3./sub.N.sub.4./sub. diaphragm and optoelectronic sensing.
  • Pressure sensor with SI.sub.3./sub.N.sub.4./sub. diaphragm and optoelectronic sensing. (en)
skos:notation
  • RIV/68081731:_____/01:12020163!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 327 ; 329
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 692611
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/01:12020163
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pressure; nitride membrane; optoelectronic (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [57849CA30E67]
http://linked.open...v/mistoKonaniAkce
  • Lisabon [PT]
http://linked.open...i/riv/mistoVydani
  • Lisabon
http://linked.open...i/riv/nazevZdroje
  • TEMI 2001 - 11th IMEKO TC-4 Symposium on Trends in Electrical Measurement and Instrumentation.
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Vrba, R.
  • Matějka, František
  • Beneš, P.
  • Kolařík, V.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Instituto de Telecomunicacoes
https://schema.org/isbn
  • 972-98115-4-7
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