About: TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron

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About: TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Hybrid PVD-PECVD process of titanium sputtering in a mixture of argon and acetylene combines aspects of both conventional techniques: sputtering of a rotating cylindrical titanium sputtering target (target size: 110 x 510 mm) by DC power and deposition from plasma activated acetylene which acts as a source of carbon for polymerization (PECVD). Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited on high speed steel and tungsten carbide cermet substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW (450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively. Hybrid PVD-PECVD process of titanium sputtering in a mixture of argon and acetylene combines aspects of both conventional techniques: sputtering of a rotating cylindrical titanium sputtering target (target size: 110 x 510 mm) by DC power and deposition from plasma activated acetylene which acts as a source of carbon for polymerization (PECVD). Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited on high speed steel and tungsten carbide cermet substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW (450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively. (en)
Title	TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron (en)
skos:prefLabel	TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron (en)
skos:notation	RIV/00216224:14310/13:00066348!RIV14-MSM-14310___
http://linked.open...avai/predkladatel	Přírodovědecká fakulta
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0086), P(GAP205/12/0407)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Žemlička, Radek Souček, Pavel Vašina, Petr Buršíková, Vilma
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	110796
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/13:00066348
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	magnetron sputtering; TiC; cylindrical magnetron (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering cylindrical magnetron TiC
http://linked.open...ontrolniKodProRIV	[8B520406835C]
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Regional R&D center for low-cost plasma and nanotechnology surface modifications Understanding of Hybrid PVD-PECVD Process with Aim to Control Grow of Nanostructured Composite Coatings
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Vašina, Petr Vogel, Petr Žemlička, Radek Jílek, Mojmír Souček, Pavel
http://localhost/t...ganizacniJednotka	14310

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