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About:
Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
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Description
This paper dsiscusses the tybrid PVD-PECVD process and its application for carbon ritch nanocomposite thin film deposition
This paper dsiscusses the tybrid PVD-PECVD process and its application for carbon ritch nanocomposite thin film deposition
(en)
Title
Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
(en)
skos:prefLabel
Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
(en)
skos:notation
RIV/00216224:14310/12:00057672!RIV13-GA0-14310___
http://linked.open...avai/predkladatel
Přírodovědecká fakulta
http://linked.open...avai/riv/aktivita
P
http://linked.open...avai/riv/aktivity
P(ED2.1.00/03.0086), P(GAP205/12/0407)
http://linked.open...vai/riv/dodaniDat
2013
http://linked.open...aciTvurceVysledku
Souček, Pavel
Schmidtová, Tereza
Vašina, Petr
Buršíková, Vilma
http://linked.open.../riv/druhVysledku
D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju
S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele
Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku
139953
http://linked.open...ai/riv/idVysledku
RIV/00216224:14310/12:00057672
http://linked.open...riv/jazykVysledku
eng - angličtina
http://linked.open.../riv/klicovaSlova
hybrid PVD-PECVD; magnetron sputtering
(en)
http://linked.open.../riv/klicoveSlovo
hybrid PVD-PECVD
magnetron sputtering
http://linked.open...ontrolniKodProRIV
[EFE1E5063B64]
http://linked.open...v/mistoKonaniAkce
Rožnov pod Radhoštěm
http://linked.open...i/riv/mistoVydani
Trenčín
http://linked.open...i/riv/nazevZdroje
Vrstvy a povlaky 2010: Zborník prednášok
http://linked.open...in/vavai/riv/obor
BL
http://linked.open...ichTvurcuVysledku
4
(
xsd:int
)
http://linked.open...cetTvurcuVysledku
4
(
xsd:int
)
http://linked.open...vavai/riv/projekt
Regional R&D center for low-cost plasma and nanotechnology surface modifications
Understanding of Hybrid PVD-PECVD Process with Aim to Control Grow of Nanostructured Composite Coatings
http://linked.open...UplatneniVysledku
2012
http://linked.open...iv/tvurceVysledku
Buršíková, Vilma
Vašina, Petr
Schmidtová, Tereza
Souček, Pavel
http://linked.open...vavai/riv/typAkce
EUR - Evropská
http://linked.open.../riv/zahajeniAkce
2012-01-01
(
xsd:date
)
number of pages
2
(
xsd:int
)
http://purl.org/ne...btex#hasPublisher
Miloš Vavrík - Knihvazačstvo Trenčín
https://schema.org/isbn
9788097082413
http://localhost/t...ganizacniJednotka
14310
is
http://linked.open...avai/riv/vysledek
of
Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
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