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Description
  • Deposition of diamond like films with an incorporation of silicon by plasma enhanced CVD technique from mixture of methane, argon and hexamethyldisiloxane (HMDSO). Study of the influence of the percentage of HMDSO in the mixture on film properties.
  • Deposition of diamond like films with an incorporation of silicon by plasma enhanced CVD technique from mixture of methane, argon and hexamethyldisiloxane (HMDSO). Study of the influence of the percentage of HMDSO in the mixture on film properties. (en)
Title
  • Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films
  • Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films (en)
skos:prefLabel
  • Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films
  • Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films (en)
skos:notation
  • RIV/00216224:14310/00:00003103!RIV/2002/MSM/143102/N
http://linked.open.../vavai/riv/strany
  • 408
http://linked.open...avai/riv/aktivita
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  • P(VS96084), Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
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  • 721678
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  • RIV/00216224:14310/00:00003103
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • PECVD, Diamond-like Carbon, Protective thin films, Silicon doping, (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [E70D4DC27E55]
http://linked.open...v/mistoKonaniAkce
  • Miskolc - Lillafüred, Hungary
http://linked.open...i/riv/mistoVydani
  • Miskolc - Lillafüred, Hungary
http://linked.open...i/riv/nazevZdroje
  • Abstracts of Invited Lecturers and Contributed Papers ,XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
http://linked.open...in/vavai/riv/obor
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  • Buršíková, Vilma
  • Dvořák, Pavel
  • Janča, Jan
  • Zajíčková, Lenka
  • Subedi, Deepak Prasad
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • European Physical Society
http://localhost/t...ganizacniJednotka
  • 14310
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