About: Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high-density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 1011 cm-3), accompanied by data from OES for CH4 – CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown. Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high-density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 1011 cm-3), accompanied by data from OES for CH4 – CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown. (en)
Title	Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system (en)
skos:prefLabel	Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system (en)
skos:notation	RIV/68378271:_____/10:00349454!RIV11-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KAN200100801), P(KAN300100801), P(KAN301370701), Z(AV0Z10100520)
http://linked.open...iv/cisloPeriodika	37
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Peksa, Ladislav Kratochvílová, Irena Fekete, Ladislav Fendrych, František Taylor, Andrew
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	261051
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/10:00349454
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanodiamond,; thin films; PE MW CVD; linear antennas (en)
http://linked.open.../riv/klicoveSlovo	nanodiamond thin films PE MW CVD linear antennas
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[4ED563615D5F]
http://linked.open...i/riv/nazevZdroje	Journal of Physics D-Applied Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	11 (xsd:int)
http://linked.open...vavai/riv/projekt	Bioactive Biocompatible Surfaces and Novel Nanostructured Composites for Applications to Medicine and Drug Delivery Multifunctional bulk metallic materials with nanocrystalline and ultrafine-grained structure Nanostructured Macroscopic Systems - Technology and Characterisation
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	43
http://linked.open...iv/tvurceVysledku	Kratochvílová, Irena Peksa, Ladislav Fekete, Ladislav Vlček, J. Fendrych, František Nesládek, M. Taylor, Andrew Petrák, V. Liehr, M. Řezáčová, V. Kluiber, Z.
http://linked.open...ain/vavai/riv/wos	000281544100019
http://linked.open...n/vavai/riv/zamer	Specific effects in condensed systems with reduced dimension and broken symmetry
issn	0022-3727
number of pages	6 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system

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