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Description
  • Pozorovali jsme, že hydrogenace vodíkovým plazmatem po dobu 30 min efektivně pasivovala defekty a zlepšila Hallovou pohyblivost, hustotu záchytu náboje a intenzitu fotoluminescence. Zdá se, že nadměrná hydrogenace nejen pasivovala defekty, ale také vytvořila nové uvnitř zrn (cs)
  • We have observed that remote plasma hydrogenation with duration up to 30 min. effectively passivated the defects and improved the Hall mobility, trap density and hydrogenation not only pasivated defects but also created new defects in the grain
  • We have observed that remote plasma hydrogenation with duration up to 30 min. effectively passivated the defects and improved the Hall mobility, trap density and hydrogenation not only pasivated defects but also created new defects in the grain (en)
Title
  • Effect of hydrogen passivation on polycrystalline silicon thin films
  • Efekt pasivace vodíkem na polykrystalické křemíkové tenké vrstvy (cs)
  • Effect of hydrogen passivation on polycrystalline silicon thin films (en)
skos:prefLabel
  • Effect of hydrogen passivation on polycrystalline silicon thin films
  • Efekt pasivace vodíkem na polykrystalické křemíkové tenké vrstvy (cs)
  • Effect of hydrogen passivation on polycrystalline silicon thin films (en)
skos:notation
  • RIV/68378271:_____/05:00028425!RIV06-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 152;156
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/05/H003), P(IAA1010316), P(IAA1010413), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika
  • -
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 519325
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/05:00028425
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • hydrogen passivation; polycrystalline silicon; photoluminescence; Raman spectroscopy; Si-H2; hydrogen molecules (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [3CC03117C439]
http://linked.open...i/riv/nazevZdroje
  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 487
http://linked.open...iv/tvurceVysledku
  • Ledinský, Martin
  • Fejfar, Antonín
  • Oswald, Jiří
  • Kočka, Jan
  • Yamazaki, T.
  • Honda, Shinya
  • Mates, Tomáš
  • Fuyuki, T.
  • Uraoka, Y.
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
is http://linked.open...avai/riv/vysledek of
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