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rdf:type
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Description
| - In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern.
- In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern. (en)
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Title
| - Modified knife-edge method for current density distribution measurements in e-beam writers
- Modified knife-edge method for current density distribution measurements in e-beam writers (en)
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skos:prefLabel
| - Modified knife-edge method for current density distribution measurements in e-beam writers
- Modified knife-edge method for current density distribution measurements in e-beam writers (en)
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skos:notation
| - RIV/68081731:_____/13:00397634!RIV14-TA0-68081731
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http://linked.open...avai/predkladatel
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - I, P(ED0017/01/01), P(TE01020118)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68081731:_____/13:00397634
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - electron-beam; intensity distribution; aperture; detector; profile; size (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Journal of Vacuum Science & Technology B
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Horáček, Miroslav
- Matějka, Milan
- Bok, Jan
- Kolařík, Vladimír
- Matějka, František
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http://linked.open...ain/vavai/riv/wos
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issn
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number of pages
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http://bibframe.org/vocab/doi
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