About: Physical properties and high-temperature oxidation resistance of sputtered Si3N4/MoNx nanocomposite coatings     Goto   Sponge   Distinct   Permalink

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Description
  • This article reports on structure, phase composition and high-T oxidation resistance of sputtered Mo-Si-N films. These films were dc reactively sputtered using an unbalanced magnetron equipped with a MoSi2 alloyed target in a mixture Ar and N2.
  • This article reports on structure, phase composition and high-T oxidation resistance of sputtered Mo-Si-N films. These films were dc reactively sputtered using an unbalanced magnetron equipped with a MoSi2 alloyed target in a mixture Ar and N2. (en)
  • Tento článek pojednává o struktuře, fázovém složení a vysokoteplotní odolnosti vůči oxidaci naprašovaných Mo-Si-N tenkých vrstev. Tyto vrstvy byly reaktivně naprášeny použitím nevyváženého magnetronu se zdrojem stejnosměrného napětí a MoSi2 slitinovým te (cs)
Title
  • Physical properties and high-temperature oxidation resistance of sputtered Si3N4/MoNx nanocomposite coatings
  • Fyzikální vlastnosti a vysokoteplotní odolnost vůči oxidaci naprašovaných Si3N4/MoNx nanokompozitních povlaků (cs)
  • Physical properties and high-temperature oxidation resistance of sputtered Si3N4/MoNx nanocomposite coatings (en)
skos:prefLabel
  • Physical properties and high-temperature oxidation resistance of sputtered Si3N4/MoNx nanocomposite coatings
  • Fyzikální vlastnosti a vysokoteplotní odolnost vůči oxidaci naprašovaných Si3N4/MoNx nanokompozitních povlaků (cs)
  • Physical properties and high-temperature oxidation resistance of sputtered Si3N4/MoNx nanocomposite coatings (en)
skos:notation
  • RIV/49777513:23520/05:00000212!RIV06-MSM-23520___
http://linked.open.../vavai/riv/strany
  • 1568-1575
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika
  • 0
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 536004
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/05:00000212
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • nanocomposite films; oxidation resistance; magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [3A4FEB18252B]
http://linked.open...i/riv/nazevZdroje
  • Journal of Vacuum Science and Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 23
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Zeman, Petr
  • Dohnal, Pavel
http://linked.open...n/vavai/riv/zamer
issn
  • 0734-2101
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
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