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Statements

Subject Item
n2:RIV%2F26821532%3A_____%2F13%3A%230000072%21RIV14-TA0-26821532
rdf:type
n12:Vysledek skos:Concept
dcterms:description
This work deals with estimation of the bond strength on the as-bonded interface by the razor blade test. The results are discussed with respect to the quality of the final SOI wafer. The effect of pre-bonding plasma activation of wafer surface in various gases as well as the effect of hydrophilicity or hydrophobicity of the surfaces is discussed. This work deals with estimation of the bond strength on the as-bonded interface by the razor blade test. The results are discussed with respect to the quality of the final SOI wafer. The effect of pre-bonding plasma activation of wafer surface in various gases as well as the effect of hydrophilicity or hydrophobicity of the surfaces is discussed.
dcterms:title
Direct wafer bonding for SOI Direct wafer bonding for SOI
skos:prefLabel
Direct wafer bonding for SOI Direct wafer bonding for SOI
skos:notation
RIV/26821532:_____/13:#0000072!RIV14-TA0-26821532
n12:predkladatel
n19:ico%3A26821532
n3:aktivita
n11:P
n3:aktivity
P(TA01010078)
n3:dodaniDat
n18:2014
n3:domaciTvurceVysledku
n10:1388428
n3:druhVysledku
n6:D
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
69800
n3:idVysledku
RIV/26821532:_____/13:#0000072
n3:jazykVysledku
n21:eng
n3:klicovaSlova
SOI, Silicon-On-Insulator, Bonding, Silicon, Semiconductor, Bonding
n3:klicoveSlovo
n9:Semiconductor n9:SOI n9:Silicon-On-Insulator n9:Silicon n9:Bonding
n3:kontrolniKodProRIV
[4101C81EF17B]
n3:mistoKonaniAkce
Kežmarské Žľaby. Slovenská republika
n3:mistoVydani
Bratislava, Slovenská republika.
n3:nazevZdroje
Proceedings of 23rd Joint Seminar %22Development of Materials Science in Research and Education%22
n3:obor
n4:JJ
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
1
n3:projekt
n20:TA01010078
n3:rokUplatneniVysledku
n18:2013
n3:tvurceVysledku
Válek, Lukáš
n3:typAkce
n14:EUR
n3:zahajeniAkce
2013-01-01+01:00
s:numberOfPages
65
n17:hasPublisher
CSACG
n7:isbn
978-80-970896-5-8