. "[FEA7CC612510]" . . "M\u00FCnz, Filip" . "Za\u0159\u00EDzen\u00ED pro m\u011B\u0159en\u00ED tlou\u0161\u0165ky polovodi\u010Dov\u00FDch vrstevnat\u00FDch struktur SOI"@cs . "Apparatus to measure thickness of SOI semiconductor layered structures"@en . . . "Apparatus to measure thickness of SOI semiconductor layered structures"@en . . "56963" . . "http://spisy.upv.cz/UtilityModels/FullDocuments/FDUM0027/uv027013.pdf" . "14310" . . . . . . . . "thin layer; mapping; spectroscopy"@en . "2"^^ . "RIV/00216224:14310/14:00073312!RIV15-TA0-14310___" . "Za\u0159\u00EDzen\u00ED pro m\u011B\u0159en\u00ED tlou\u0161\u0165ky polovodi\u010Dov\u00FDch vrstevnat\u00FDch struktur SOI"@cs . . "2"^^ . . "RIV/00216224:14310/14:00073312" . . "Technick\u00E9 \u0159e\u0161en\u00ED se t\u00FDk\u00E1 za\u0159\u00EDzen\u00ED pro m\u011B\u0159en\u00ED tlou\u0161\u0165ky polovodi\u010Dov\u00FDch vrstevnat\u00FDch struktur SOI optickou metodou ve VIS/NIR oblasti s p\u0159esnost\u00ED cca 30 nm v rozsahu 1-10 mikrometr\u016F; zahrnuje zdroj z\u00E1\u0159en\u00ED, optick\u00E1 vl\u00E1kna, skener, spektrometr, \u0159\u00EDd\u00EDc\u00ED elektroniku a po\u010D\u00EDta\u010D." . . "27013" . "Technical solution targets measurements of thickness of SOI layered semiconductor structures through optical means in VIS/NIR range with precision of 30 nm in 1-10 micron range; it comprises a light source, optical fibers, scanner, spectrometer, control electronics and computer"@en . . . "2014-06-10+02:00"^^ . "Prague" . "P(TA01010078)" . . "Technick\u00E9 \u0159e\u0161en\u00ED se t\u00FDk\u00E1 za\u0159\u00EDzen\u00ED pro m\u011B\u0159en\u00ED tlou\u0161\u0165ky polovodi\u010Dov\u00FDch vrstevnat\u00FDch struktur SOI optickou metodou ve VIS/NIR oblasti s p\u0159esnost\u00ED cca 30 nm v rozsahu 1-10 mikrometr\u016F; zahrnuje zdroj z\u00E1\u0159en\u00ED, optick\u00E1 vl\u00E1kna, skener, spektrometr, \u0159\u00EDd\u00EDc\u00ED elektroniku a po\u010D\u00EDta\u010D."@cs . . "Za\u0159\u00EDzen\u00ED pro m\u011B\u0159en\u00ED tlou\u0161\u0165ky polovodi\u010Dov\u00FDch vrstevnat\u00FDch struktur SOI" . "Huml\u00ED\u010Dek, Josef" . . "Za\u0159\u00EDzen\u00ED pro m\u011B\u0159en\u00ED tlou\u0161\u0165ky polovodi\u010Dov\u00FDch vrstevnat\u00FDch struktur SOI" . "\u00DA\u0159ad pr\u016Fmyslov\u00E9ho vlastnictv\u00ED" .