"2014-03-03+01:00"^^ . "Platforma pokro\u010Dil\u00FDch mikroskopick\u00FDch a spektroskopick\u00FDch technik pro nano a mikrotechnologie" . . "71"^^ . . "71"^^ . . "Electron beam lithography" . "Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC"@en . "http://www.isvav.cz/projectDetail.do?rowId=TE01020233"^^ . . . "TE01020233" . " Nanofabrication" . . . . . . "0"^^ . . "2015-05-26+02:00"^^ . "1"^^ . "The project forms a RaD platform bringing together 3 companies and 2 research intsitutions in CR which will be aimed at 1) building complex scientific instruments and 2) finding methods and procedures for its application in fabrication and characterization of functional nanostructures and semiconductor materials/devices. The 2nd activity will result in technologies and analyses for high-tech applications both for professional and public community ((bio)sensors, security elements,etc.)."@en . "4"^^ . . . "Projekt vytv\u00E1\u0159\u00ED VaV platformu sdru\u017Euj\u00EDc\u00ED 3 high-tech firmy a 2 p\u0159edn\u00ED v\u00FDzkumn\u00E1 pracovi\u0161t\u011B v \u010CR, kter\u00E1 se zam\u011B\u0159\u00ED na 1) budov\u00E1n\u00ED komplexn\u00ED p\u0159\u00EDstrojov\u00E9 z\u00E1kladny a 2) hled\u00E1n\u00ED metod a postup\u016F pro jej\u00ED aplikaci p\u0159i tvorb\u011B a charakterizaci funk\u010Dn\u00EDch nanostruktur a polovodi\u010Dov\u00FDch materi\u00E1l\u016F/sou\u010D\u00E1stek. Druh\u00E1 aktivita povede ke vzniku portfolia technologi\u00ED a diagnostick\u00FDch postup\u016F pro tvorbu nov\u00FDch high-tech aplikac\u00ED pro odbornou komunitu i ve\u0159ejnost ((bio)sensor\u016F, optick\u00FDch bezpe\u010Dnostn\u00EDch prvk\u016F aj.)." . . . " Ultra high vacuum" . . " Scanning electron microscopy" . "2019-12-31+01:00"^^ . . "2012-03-01+01:00"^^ . . "Electron beam lithography, Scanning electron microscopy, Scanning probe microscopy, Ultra high vacuum, Nanofabrication, Functional properties of nanostructures"@en . . " Scanning probe microscopy" .