. "Leipner, Igor" . . . "RIV:J23/97:X1KFY0031!RIV/1998/MSM/MSM8X10" . . "RIV:J23/97:X1KFY0031" . "Plasma sources science and technology" . "A comparison of internal plasma parameters in a conventional planar magnetron and a magnatron with additional plasma confinement"@en . . . "Jaroslav, Vl\u010Dek" . "456;52" . "A comparison of internal plasma parameters in a conventional planar magnetron and a magnatron with additional plasma confinement"@en . "0963-0252" . "\u0160patenka, Petr" . . "P(GV106/96/K245), P(VS96059)" . "Porovn\u00E1n\u00ED vnit\u0159n\u00EDch parametr\u016F plazmatu v konven\u010Dn\u00EDm plan\u00E1rn\u00EDm magnetronu a v magnetronu s dodate\u010Dn\u00FDm omezen\u00EDm plazmatu" . . . "Musil, Jind\u0159ich" . "4"^^ . "[D10B86C068BA]" . "ro\u010D. 1997" . "23520" . . "0"^^ . . . "3"^^ . "808872" . "\u010D. 6" . . "Porovn\u00E1n\u00ED vnit\u0159n\u00EDch parametr\u016F plazmatu v konven\u010Dn\u00EDm plan\u00E1rn\u00EDm magnetronu a v magnetronu s dodate\u010Dn\u00FDm omezen\u00EDm plazmatu" . .