"Europment" . . "Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate" . "Svoboda, Jaroslav" . "1790-5117" . . . "Hru\u0161ka, Franti\u0161ek" . "Mart\u00EDnek, Tom\u00E1\u0161" . . . "6"^^ . . . "Rhodes" . . "Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate"@en . . "Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate" . . "28140" . "RIV/70883521:28140/14:43871464!RIV15-MSM-28140___" . "Latest Trends on Systems. Volume I" . "K\u0159es\u00E1lek, Vojt\u011Bch" . "P(ED2.1.00/03.0089)" . "Navr\u00E1til, Milan" . "RIV/70883521:28140/14:43871464" . "This paper deals with measuring principles of scanning probe microscopy (force microscopy and microwave microscopy) which is applied to diagnostician of ultra-thin tungsten films on silicon substrate. Tungsten was sputtered on silicon wafer with radio frequency magnetron sputtering method. Some topographical and electromagnetic properties were measured and visualized."@en . . . "This paper deals with measuring principles of scanning probe microscopy (force microscopy and microwave microscopy) which is applied to diagnostician of ultra-thin tungsten films on silicon substrate. Tungsten was sputtered on silicon wafer with radio frequency magnetron sputtering method. Some topographical and electromagnetic properties were measured and visualized." . "atomic force microscopy, scanning microwave microscopy, tungsten on silicon substrate, ultra-thin film."@en . "2014-07-17+02:00"^^ . "978-1-61804-243-9" . "5"^^ . . . . . "43861" . "6"^^ . . . . . . "Santorini Island" . "Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate"@en . "[80BBECDB0755]" . "Kud\u011Blka, Josef" .