"4"^^ . "MEMS senzory a jejich aplikace" . "Technick\u00E1 univerzita v Liberci" . . . "978-80-7372-640-9" . "270332" . . . . "MEMS sensors and its aplication"@en . . "V sou\u010Dasn\u00E9 dob\u011B je viditeln\u00FD velk\u00FD rozvoj tak\u00E9 v oblasti MEMS senszor\u016F (Micro-Electro-Mechanical-System). D\u016Fvodem jsou po\u017Eadavky praxe, proto\u017Ee tyto senzory jsou miniaturn\u00ED, maj\u00ED vysokou citlivost, malou spot\u0159ebu, \u0161irok\u00FD rozsah aplikac\u00ED, vysokou integraci spojenou s embedded mikrokontrolerem a tak\u00E9 WiFi v\u00FDstupem. Z\u00E1kladem v\u00FDroby MEMS senzor\u016F je specifick\u00E1 polovodi\u010Dov\u00E1 technologie, kter\u00E1 umo\u017E\u0148uje realizovat mikromechanick\u00E9 prvky, kondenz\u00E1tory, c\u00EDvka, rota\u010Dn\u00ED d\u00EDly, motorky, \u010Derpadla, dotykov\u00E9 plo\u0161ky, mikrofony, v\u0161e na substr\u00E1tu polovodi\u010De. Uplatn\u011Bn\u00ED je v technice regulace a \u0159\u00EDzen\u00ED, za\u0159\u00EDzen\u00ED informatiky, medic\u00EDny, bezpe\u010Dnostn\u00EDch prvc\u00EDch." . . "Hru\u0161ka, Franti\u0161ek" . "Liberec" . "MEMS senzory a jejich aplikace"@cs . "1"^^ . "Liberec" . . . "MEMS senzory a jejich aplikace" . "V sou\u010Dasn\u00E9 dob\u011B je viditeln\u00FD velk\u00FD rozvoj tak\u00E9 v oblasti MEMS senszor\u016F (Micro-Electro-Mechanical-System). D\u016Fvodem jsou po\u017Eadavky praxe, proto\u017Ee tyto senzory jsou miniaturn\u00ED, maj\u00ED vysokou citlivost, malou spot\u0159ebu, \u0161irok\u00FD rozsah aplikac\u00ED, vysokou integraci spojenou s embedded mikrokontrolerem a tak\u00E9 WiFi v\u00FDstupem. Z\u00E1kladem v\u00FDroby MEMS senzor\u016F je specifick\u00E1 polovodi\u010Dov\u00E1 technologie, kter\u00E1 umo\u017E\u0148uje realizovat mikromechanick\u00E9 prvky, kondenz\u00E1tory, c\u00EDvka, rota\u010Dn\u00ED d\u00EDly, motorky, \u010Derpadla, dotykov\u00E9 plo\u0161ky, mikrofony, v\u0161e na substr\u00E1tu polovodi\u010De. Uplatn\u011Bn\u00ED je v technice regulace a \u0159\u00EDzen\u00ED, za\u0159\u00EDzen\u00ED informatiky, medic\u00EDny, bezpe\u010Dnostn\u00EDch prvc\u00EDch."@cs . . "The big progress has the field of MEMS (Micro-Electro-Mechanical-System) sensors in this time. Miniaturization, high sensitivity, integration sensors and signal condition and communication circuits, reliability are the reason. The base of MEMS sensors is new technology of semiconductors, which can realize micromechanical elements, capacitance with moved electrode, inductance, rolled parts, micromotors, micropumps, touch elements, microphones, electronical elements. Using of the MEMS sensors has wide range from control, informatics, medicine and security in its technical means."@en . "Sborn\u00EDk p\u0159\u00E1sp\u011Bvk\u016F z Mezin\u00E1rodn\u00ED konference u\u010Ditel\u016F elektrotechniky SEKEL 2010" . "MEMS senzory a jejich aplikace"@cs . "V" . . . "1"^^ . . "28140" . "RIV/70883521:28140/10:63509001!RIV11-MSM-28140___" . . "MEMS sensor; accelerometer; gyroscopy; pressure; semiconductor; micromachine"@en . . . . . "[7F781C364770]" . "RIV/70883521:28140/10:63509001" . "MEMS sensors and its aplication"@en . "2010-01-01+01:00"^^ .