"Konfigurace PLD a Iontov\u00E9ho d\u011Bla pro modifikaci vrstev" . "Iontov\u00E9 d\u011Blo umo\u017E\u0148uje bombardovat povrch vyr\u016Fstaj\u00EDc\u00ED tenk\u00E9 vrstvy ionty pracovn\u00EDho plynu, nej\u010Dast\u011Bji argonu, a t\u00EDm v pr\u016Fb\u011Bhu procesu nan\u00E1\u0161en\u00ED pozm\u011Bnit re\u017Eim r\u016Fstu tenk\u00E9 vrstvy a n\u00E1sledn\u011B i jej\u00ED fyzik\u00E1ln\u00ED, chemick\u00E9 a mechanick\u00E9 vlastnosti. Energetick\u00E9 ionty budou rozru\u0161ovat %22slab\u00E9%22 vazby mezi atomy a t\u00EDm ve vrstv\u011B up\u0159ednost\u0148ovat vznik %22siln\u00FDch%22 vazeb, kter\u00E9 jsou nezbytn\u00E9 pro vznik tvrd\u00FDch vrstev. V kombinaci s laserovou PLD umo\u017En\u00ED realizovat vrstvy nov\u00FDch vlastnost\u00ED. Specialn\u00ED konfigurace obou prvk\u016F (p\u0159\u00EDstroj\u016F : PLD a iontov\u00E9ho d\u011Bla) ve vakuov\u00E9 interak\u010Dn\u00ED komo\u0159e umo\u017En\u00ED optim\u00E1ln\u00ED konfiguraci pro doc\u00EDlen\u00ED po\u017Eadovan\u00FDch v\u00FDstup\u016F."@cs . "2"^^ . "Konfigurace PLD a Iontov\u00E9ho d\u011Bla pro modifikaci vrstev" . . "The ion gun allows bombardement of the surface of the growing thin film by ions of processing atmosphere, most often by argon. Than it is possible, during the coating, to change the growing thin film and its physical, mechanical and chemical properties. The energy ion will break up the %22weak%22 bonds between atoms. Then, the formation the %22strong%22 bonds in the layer is expressed. These %22strong%22 bonds are necessary for creation of hard films. The special configuration of PLD and ion gun in the vacuum interaction chamber make posssible to reach the requested results."@en . . "thin films; vacuum chamber; PLD"@en . . . . "Configuration of PLD and Ion gun for films modification"@en . "Konfigurace PLD a Iontov\u00E9ho d\u011Bla pro modifikaci vrstev"@cs . "RIV/68407700:21460/10:00169860" . "25000 K\u010D" . . "Configuration of PLD and Ion gun for films modification"@en . "21460" . . "2010-4" . . . "Kocourek, Tom\u00E1\u0161" . "Rozm\u011Bry : 40 cm d\u00E9lka a pr\u016Fm\u011Br 15 cm. Vlastn\u00EDkem v\u00FDsledku je \u010CVUT v Praze, I\u010C 68407700." . "Jel\u00EDnek, Miroslav" . "Iontov\u00E9 d\u011Blo umo\u017E\u0148uje bombardovat povrch vyr\u016Fstaj\u00EDc\u00ED tenk\u00E9 vrstvy ionty pracovn\u00EDho plynu, nej\u010Dast\u011Bji argonu, a t\u00EDm v pr\u016Fb\u011Bhu procesu nan\u00E1\u0161en\u00ED pozm\u011Bnit re\u017Eim r\u016Fstu tenk\u00E9 vrstvy a n\u00E1sledn\u011B i jej\u00ED fyzik\u00E1ln\u00ED, chemick\u00E9 a mechanick\u00E9 vlastnosti. Energetick\u00E9 ionty budou rozru\u0161ovat %22slab\u00E9%22 vazby mezi atomy a t\u00EDm ve vrstv\u011B up\u0159ednost\u0148ovat vznik %22siln\u00FDch%22 vazeb, kter\u00E9 jsou nezbytn\u00E9 pro vznik tvrd\u00FDch vrstev. V kombinaci s laserovou PLD umo\u017En\u00ED realizovat vrstvy nov\u00FDch vlastnost\u00ED. Specialn\u00ED konfigurace obou prvk\u016F (p\u0159\u00EDstroj\u016F : PLD a iontov\u00E9ho d\u011Bla) ve vakuov\u00E9 interak\u010Dn\u00ED komo\u0159e umo\u017En\u00ED optim\u00E1ln\u00ED konfiguraci pro doc\u00EDlen\u00ED po\u017Eadovan\u00FDch v\u00FDstup\u016F." . . "Konfigurace PLD a Iontov\u00E9ho d\u011Bla pro modifikaci vrstev"@cs . . . "S" . "Laborato\u0159 Excimerov\u00E9ho laseru 1LF a FBMI \u010CVUT, Praha - Albetrov" . . . . . . "2"^^ . "[A6CFD0347FFA]" . "266952" . "RIV/68407700:21460/10:00169860!RIV11-MSM-21460___" . .