. "Kocourek, Tom\u00E1\u0161" . "80 000,- K\u010D" . . . . "Jel\u00EDnek, Miroslav" . "Equimpment for rotation and deposition from several targets"@en . . "Za\u0159\u00EDzen\u00ED do depozi\u010Dn\u00ED komory, p\u0159ipojen\u00E9 p\u0159es p\u0159\u00EDrubu CF40, umo\u017E\u0148uj\u00EDc\u00ED v\u00FDm\u011Bnu ter\u010D\u016F b\u011Bhem depozice a jejich rotaci." . "Za\u0159\u00EDzen\u00ED pro rotaci a depozici z v\u00EDce ter\u010D\u016F" . "2"^^ . . "2"^^ . "PLD; chamber; rotation; target"@en . . "Za\u0159\u00EDzen\u00ED pro rotaci a depozici z v\u00EDce ter\u010D\u016F"@cs . "[1D4A47A85444]" . "Za\u0159\u00EDzen\u00ED pro rotaci a depozici z v\u00EDce ter\u010D\u016F" . "Equipment for deposition chamber connected by CF40, making possible to change several targets during deposition process, including target rotation."@en . . . "Equimpment for rotation and deposition from several targets"@en . "Albertov, Laborato\u0159 laserov\u00FDch technologi\u00ED, 106__-n01-__12" . "406404" . . . . . . "21460" . . "12V" . "Za\u0159\u00EDzen\u00ED pro rotaci a depozici z v\u00EDce ter\u010D\u016F"@cs . . . . "Za\u0159\u00EDzen\u00ED do depozi\u010Dn\u00ED komory, p\u0159ipojen\u00E9 p\u0159es p\u0159\u00EDrubu CF40, umo\u017E\u0148uj\u00EDc\u00ED v\u00FDm\u011Bnu ter\u010D\u016F b\u011Bhem depozice a jejich rotaci."@cs . "IP-6" . "S" . "RIV/68407700:21460/08:12145127!RIV09-MSM-21460___" . . "RIV/68407700:21460/08:12145127" .