. "DE - Spolkov\u00E1 republika N\u011Bmecko" . "9"^^ . . . . "Colpo, P." . . . "Ceccone, G." . . "Levashov, E. A." . "1"^^ . "TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10%\u2009CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated."@en . "Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application" . "Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application"@en . "Nanocomposite Films; inductively coupled plasma"@en . "[783BA31150D7]" . . "Rossi, F." . "TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10%\u2009CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated." . "478463" . "Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application"@en . "Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application" . . "RIV/68407700:21460/06:12117676!RIV08-MSM-21460___" . "82" . . "Applied Physics A: Materials Science and Processing" . . "503;507" . "Jel\u00EDnek, Miroslav" . "Gipson, P. N." . "Hybridn\u00ED ICP-napra\u0161ov\u00E1n\u00ED nanokompozitn\u00EDch vrstev TiC/CaO pro biomedic\u00EDnsk\u00E9 aplikace."@cs . "21460" . "RIV/68407700:21460/06:12117676" . "Shtansky, D. V." . "Philip, P. J. M." . "Hybridn\u00ED ICP-napra\u0161ov\u00E1n\u00ED nanokompozitn\u00EDch vrstev TiC/CaO pro biomedic\u00EDnsk\u00E9 aplikace."@cs . "5"^^ . "Kulisch, W." . "3" . "0947-8396" . . "Z(MSM6840770012)" . . "Hybridn\u00ED ICP-napra\u0161ov\u00E1n\u00ED nanokompozitn\u00EDch vrstev TiC/CaO pro biomedic\u00EDnsk\u00E9 aplikace."@cs . .