"Detection of residual molybdenum impurity in CVD diamond"@en . . "199" . "Detection of residual molybdenum impurity in CVD diamond"@en . . . . "Physica Status Solidi" . "Kromka, A." . "1" . . . "Raman scattering, X-ray photoemission spectroscopy (XPS), Fourier transform photocurrent spectroscopy (FTPS), Rutherford backscattering (RBS) and electron paramagnetic resonance (EPR) method have been used for characterization of diamond layers deposited by microwave plasma enhanced chemical vapor deposition (MWPECVD). As substrates, thick silicon wafers pretreated by the mechanical seeding have been used, surrounded by the molybdenum ring. Here we report how this configuration can lead to the Mo contamination of diamond layers (similar effect to the well known contamination of diamond by Si) and we study the optical spectra related to the presence of molybdenum and other impurities over the bulk of deposited layers. Mo contamination was confirmed by XPS measurements, but we were not able to detect it by RBS and EPR" . "1"^^ . . "Poruba, A." . . "P(GA202/02/0218), P(KSK1010104), Z(AV0Z1010914), Z(AV0Z1048901), Z(MSM 210000021)" . "Zemek, J." . "5"^^ . "DE - Spolkov\u00E1 republika N\u011Bmecko" . . . . "RIV/68407700:21340/03:04092443" . "108 ; 112" . . . . "Rosa, J." . . "0031-8965" . . . "Pe\u0159ina, V." . "RIV/68407700:21340/03:04092443!RIV/2004/MSM/213404/N" . . "Detection of residual molybdenum impurity in CVD diamond" . "CVD,Diamond,Raman Scattering,XPS"@en . "21340" . "Detection of residual molybdenum impurity in CVD diamond" . "[FFB7C8EF8C39]" . "Van\u011B\u010Dek, M." . . "7"^^ . . "Raman scattering, X-ray photoemission spectroscopy (XPS), Fourier transform photocurrent spectroscopy (FTPS), Rutherford backscattering (RBS) and electron paramagnetic resonance (EPR) method have been used for characterization of diamond layers deposited by microwave plasma enhanced chemical vapor deposition (MWPECVD). As substrates, thick silicon wafers pretreated by the mechanical seeding have been used, surrounded by the molybdenum ring. Here we report how this configuration can lead to the Mo contamination of diamond layers (similar effect to the well known contamination of diamond by Si) and we study the optical spectra related to the presence of molybdenum and other impurities over the bulk of deposited layers. Mo contamination was confirmed by XPS measurements, but we were not able to detect it by RBS and EPR"@en . "603289" . . "Kravets, Roman" .