"nen\u00ED ur\u010Deno ke komer\u010Dn\u00EDmu vyu\u017Eit\u00ED" . "Nov\u00E1k, Rudolf" . . . . . . . "P(2A-1TP1/031)" . "Syst\u00E9m pro depozici tenk\u00FDch vrstev a povlak\u016F a m\u011B\u0159en\u00ED jejich parametr\u016F" . "1"^^ . "345206" . "4"^^ . "RIV/68407700:21260/09:00167640!RIV10-MPO-21260___" . "System for thin films and coatings deposition and measurement of their parameters"@en . . "Syst\u00E9m sest\u00E1v\u00E1 z vakuov\u00FDch aparatur umo\u017E\u0148uj\u00EDc\u00EDch napa\u0159ov\u00E1n\u00ED a napra\u0161ov\u00E1n\u00ED kovov\u00FDch a nitridov\u00FDch tenk\u00FDch vrstev a povlak\u016F a d\u00E1le z optick\u00E9ho interferen\u010Dn\u00EDho mikroskopu, z p\u0159\u00EDstroje pro vrypov\u00FD test a optick\u00E9ho mikroskopu s digit\u00E1ln\u00ED kamerou." . "2/2009" . "21260" . . "tlou\u0161\u0165ka vrstev apovlak\u016F v rozmez\u00ED 0,5 - 10 mikrometr\u016F" . "Syst\u00E9m pro depozici tenk\u00FDch vrstev a povlak\u016F a m\u011B\u0159en\u00ED jejich parametr\u016F"@cs . "Syst\u00E9m pro depozici tenk\u00FDch vrstev a povlak\u016F a m\u011B\u0159en\u00ED jejich parametr\u016F" . . "Syst\u00E9m pro depozici tenk\u00FDch vrstev a povlak\u016F a m\u011B\u0159en\u00ED jejich parametr\u016F"@cs . "evaporation; sputtering; scratch test"@en . . "\u00DAstav fyziky 12102 Fakulty strojn\u00ED \u010CVUT" . . "V\u00EDt\u016F, Tom\u00E1\u0161" . . "Syst\u00E9m sest\u00E1v\u00E1 z vakuov\u00FDch aparatur umo\u017E\u0148uj\u00EDc\u00EDch napa\u0159ov\u00E1n\u00ED a napra\u0161ov\u00E1n\u00ED kovov\u00FDch a nitridov\u00FDch tenk\u00FDch vrstev a povlak\u016F a d\u00E1le z optick\u00E9ho interferen\u010Dn\u00EDho mikroskopu, z p\u0159\u00EDstroje pro vrypov\u00FD test a optick\u00E9ho mikroskopu s digit\u00E1ln\u00ED kamerou."@cs . "The system consists of vacuum deposition facilities enabling evaporation and sputtering of metal and nitrides thin films and coatings. Further components are the optical interference microscope, a device for scratch test and optical microscope with digital image record."@en . . . . "System for thin films and coatings deposition and measurement of their parameters"@en . . "[26AA323AA57A]" . "RIV/68407700:21260/09:00167640" . . .