. "1612-8850" . "7"^^ . "Studium katodov\u00E9ho nap\u011Bt\u00ED p\u0159i napra\u0161ov\u00E1n\u00ED s pulzov\u00E1n\u00EDm kysl\u00EDku."@cs . . "453317" . "Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere"@en . . "4" . "RIV/68407700:21260/07:06139518!RIV08-MSM-21260___" . . "coating; discharge; reactive sputtering; tungsten oxide"@en . . "Cavaleiro, A." . . "DE - Spolkov\u00E1 republika N\u011Bmecko" . "[38BDE0B27EA6]" . . "The process we used was d.c. magnetron sputtering, and we studied both the conventional process, using a constant flow of oxygen, and the process in which we pulsed the reactive gas. Square regulation signal with different pulsing periods (T) and oxygen injection time (ton) was used in the reactive gas pulsing (RGP), while the partial argon pressure was kept constant for all depositions."@en . "62;68" . . . . "Plasma Processes and Polymers" . "RIV/68407700:21260/07:06139518" . "Studium katodov\u00E9ho nap\u011Bt\u00ED p\u0159i napra\u0161ov\u00E1n\u00ED s pulzov\u00E1n\u00EDm reaktivn\u00EDho plynu: W target a Ar-O2 atmosf\u00E9ra"@cs . "1" . . "21260" . "Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere"@en . "Parreira, N. M. G." . "Z(MSM6840770038)" . "Studium katodov\u00E9ho nap\u011Bt\u00ED p\u0159i napra\u0161ov\u00E1n\u00ED s pulzov\u00E1n\u00EDm reaktivn\u00EDho plynu: W target a Ar-O2 atmosf\u00E9ra"@cs . "The process we used was d.c. magnetron sputtering, and we studied both the conventional process, using a constant flow of oxygen, and the process in which we pulsed the reactive gas. Square regulation signal with different pulsing periods (T) and oxygen injection time (ton) was used in the reactive gas pulsing (RGP), while the partial argon pressure was kept constant for all depositions." . "Polcar, Tom\u00E1\u0161" . "Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere" . . . "3"^^ . "1"^^ . . . . "Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere" .