. . "2009-05-13+02:00"^^ . "[3E280078B3C4]" . . "The work is focused on investigation of properties of thin film layer in dependence on deposition process."@en . "21230" . "2"^^ . . "The Sputtered Dielectric Thin Film Layer and Their Properties"@en . . . "The Sputtered Dielectric Thin Film Layer and Their Properties" . . "Dielectric Thin Film Layer; Reactive sputtering"@en . . "RIV/68407700:21230/09:00159888!RIV10-MSM-21230___" . "RIV/68407700:21230/09:00159888" . "Z(MSM6840770021)" . "4"^^ . "1"^^ . "The Sputtered Dielectric Thin Film Layer and Their Properties" . "32nd ISSE 2009 Proceedings" . . "The work is focused on investigation of properties of thin film layer in dependence on deposition process." . "978-1-4244-4260-7" . . . "343171" . . "Beshajov\u00E1 Pelik\u00E1nov\u00E1, Ivana" . . "Vysok\u00E9 u\u010Den\u00ED technick\u00E9 v Brn\u011B. Fakulta elektrotechniky a informatiky" . "Brno" . . . "The Sputtered Dielectric Thin Film Layer and Their Properties"@en . "Brno" .