"[A0C67E35ABEE]" . . "RIV/68407700:21230/09:00159809!RIV10-MSM-21230___" . . . "3"^^ . . . "Christchurch" . "Christchurch" . . "1"^^ . "Ultrasensitive MEMS-based Inertial System" . "4"^^ . . . . "IEEE Sensors Council" . . . "RIV/68407700:21230/09:00159809" . "This paper presents the design and fabrication of sensitive capacitive MEMS-based accelerometer and its high signal-to-noise ratio read-out electronic circuit. The combination of sensitive accelerometer and sensitive read-out electronics resulted in the system sensitivity of 135 V/G."@en . "Ultrasensitive MEMS-based Inertial System" . . "21230" . "This paper presents the design and fabrication of sensitive capacitive MEMS-based accelerometer and its high signal-to-noise ratio read-out electronic circuit. The combination of sensitive accelerometer and sensitive read-out electronics resulted in the system sensitivity of 135 V/G." . "978-1-4244-5335-1" . . . "1930-0395" . "IEEE SENSORS 2009 - The Eighth IEEE Conference on Sensors" . "Nov\u00E1k, Luk\u00E1\u0161" . "V" . "Ultrasensitive MEMS-based Inertial System"@en . . "2009-10-25+02:00"^^ . "Ultrasensitive MEMS-based Inertial System"@en . "accelerometer; tilt; MEMS"@en . "347486" .