"8"^^ . "Nanoelectronics and nanolithography"@en . "328408" . . "Voves, Jan" . . "nanolithography; local anodic oxidation; atomic force microscopy"@en . . . . . . "Ostrava" . "1"^^ . "1"^^ . . "21230" . "P(KAN400100652), Z(MSM6840770014)" . . . . . "Nanoelectronics and nanolithography"@en . . "The local anodic oxidation (LAO) by the atomic force microscope (AFM) in the AC mode could be a good alternative to standard lithographic techniques especially for the device patterning in the nanometer scale at laboratory conditions. In the combination with EBL the nanostructures with the resolution of a few tenths of nanometers could be prepared in a very fast and efficient way."@en . "RIV/68407700:21230/09:00158523!RIV11-MSM-21230___" . "2009-10-20+02:00"^^ . . "TANGER, spol.s r.o" . "The local anodic oxidation (LAO) by the atomic force microscope (AFM) in the AC mode could be a good alternative to standard lithographic techniques especially for the device patterning in the nanometer scale at laboratory conditions. In the combination with EBL the nanostructures with the resolution of a few tenths of nanometers could be prepared in a very fast and efficient way." . . . "978-80-87294-13-0" . "RIV/68407700:21230/09:00158523" . "Nanoelectronics and nanolithography" . "Ro\u017Enov pod Radho\u0161t\u011Bm" . . "[BF6D869D887B]" . "Nanoelectronics and nanolithography" . "Nanocon 2009 Conference Proceedings" . .