"3" . "354508" . "Carvalho, N.J.M." . "21230" . "1286-0042" . "RIV/68407700:21230/08:06145482" . "The conventional and RGPP process parameters (target potential, total pressure and deposition rate) and the corresponding chemical composition were used to build a simple model predicting the deposition rate and the average chemical composition of the coatings deposited by RGPP as a function of the pulsing parameters. It was shown that the measured total pressure could be used to calculate the deposition rate and the chemical composition of the RGPP coatings with reasonable precision."@en . "The conventional and RGPP process parameters (target potential, total pressure and deposition rate) and the corresponding chemical composition were used to build a simple model predicting the deposition rate and the average chemical composition of the coatings deposited by RGPP as a function of the pulsing parameters. It was shown that the measured total pressure could be used to calculate the deposition rate and the chemical composition of the RGPP coatings with reasonable precision." . . . "A simple model for the deposition of W-O coatings by reactive gas pulsing process"@en . "[C1532F925D41]" . . "Jednoduchy model pro depozici W-O vrstev reaktivnim magnetronovym naprasovanim s pulsovanim kysliku."@cs . . "Cavaleiro, A." . . . "Polcar, Tom\u00E1\u0161" . "5"^^ . "Jednoduchy model pro depozici W-O vrstev magnetronovym naprasovanim s pulzovanim reaktivniho plynu"@cs . "A simple model for the deposition of W-O coatings by reactive gas pulsing process"@en . "RIV/68407700:21230/08:06145482!RIV09-MSM-21230___" . . . . "A simple model for the deposition of W-O coatings by reactive gas pulsing process" . "Z(MSM6840770038)" . "multilayer; reactive gas pulsing; sputtering; tungsten oxide"@en . . "1"^^ . "Jednoduchy model pro depozici W-O vrstev magnetronovym naprasovanim s pulzovanim reaktivniho plynu"@cs . . "Parreira, N. M. G." . "4"^^ . "The European Physical Journal Applied Physics" . . "000258652300010" . . "43" . "FR - Francouzsk\u00E1 republika" . . . "A simple model for the deposition of W-O coatings by reactive gas pulsing process" . .