. "Mikul\u00EDk, P. M." . "This paper introduces the fabrication process of the sensors and other passive elements based on SOI technology. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates. Planar inductors and capacitors were fabricated on standard Si/SiO2 substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed."@en . "6"^^ . . . "Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology" . "V\u00FDroba struktur a senzor\u016F v technologii Silicon-on-Insulator"@cs . "978-80-214-3717-3" . "This paper introduces the fabrication process of the sensors and other passive elements based on SOI technology. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates. Planar inductors and capacitors were fabricated on standard Si/SiO2 substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed." . "Ku\u010Dera, M. K." . "[CDB946F3185C]" . . "Valenda, S. V." . "Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology"@en . "Bou\u0159a, Adam" . . "\u010Cl\u00E1nek se zab\u00FDv\u00E1 procesem v\u00FDroby senzor\u016F a pasivn\u00EDch prvk\u016F v SOI technologii. Jednoduch\u00E9 tenzometry byly vyrobeny na SIMOX SOI substr\u00E1tech. Plan\u00E1rn\u00ED induktory a kapacitory byly vyrobeny na Si/SiO2 substr\u00E1tech s napr\u00E1\u0161enou AlCuSi metalizac\u00ED. Zji\u0161\u0165ovala se teplotn\u00ED z\u00E1vislost z\u00E1kladn\u00EDch parametr\u016F."@cs . "Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology" . "Z(MSM6840770015)" . "Electronics Devices and Systems Proceedings" . "RIV/68407700:21230/08:03147704!RIV09-MSM-21230___" . "21230" . . "Vysok\u00E9 u\u010Den\u00ED technick\u00E9 v Brn\u011B" . . . "Brno" . "Brno" . "Kulha, Pavel" . "SOI technology; passive elements; strain sensor"@en . . . . "367535" . . "2008-09-10+02:00"^^ . "Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology"@en . "3"^^ . "Hus\u00E1k, Miroslav" . . . "V\u00FDroba struktur a senzor\u016F v technologii Silicon-on-Insulator"@cs . . "RIV/68407700:21230/08:03147704" . . . . "4"^^ .