. "implantation; lifetime control; protons; silicon; thermal donors"@en . "RIV/68407700:21230/08:00145356!RIV10-MSM-21230___" . . "ISPS 08 Proceedings" . . . "Hazdra, Pavel" . . "Komarnitskyy, Volodymyr" . "21230" . "RIV/68407700:21230/08:00145356" . "[A5916EFBAE41]" . . "6"^^ . . "P(GP102/08/P488), P(LC06041)" . . . . "Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates" . "2"^^ . "Praha" . . . "2"^^ . "Praha" . "\u010Cesk\u00E9 vysok\u00E9 u\u010Den\u00ED technick\u00E9 v Praze" . . "978-80-01-04139-0" . . "Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates"@en . . "377000" . "2008-08-27+02:00"^^ . . "The paper deals with local donor doping by proton implantation in p+nn+ diodes fabricated on different silicon substrates"@en . "Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates"@en . . . "The paper deals with local donor doping by proton implantation in p+nn+ diodes fabricated on different silicon substrates" . "Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates" . . .