. . "Boston" . "Boston" . "0-9767985-9-X" . "21230" . . . "In the article there is presented a new arrangement of a temperature sensor system for air velocity and direction measurement. The system utilizes temperature dependence of the current through the channel of MOS structure. The geometric arrangement of temperature sensors allows measurement of temperature gradient. Temperature gradient allows to compute direction of air flow over the chip. Optimal operating modes of weak and strong inversion of MOS structure operation have been selected for the design of integrated temperature matrix. The matrix has been used for the design of a probe for measurement. Various arrangements of MOS sensor structures have been designed. CoventorWare and CADENCE software tools have been used for simulation and modeling of sensor properties."@en . . "Bou\u0159a, Adam" . . "P(GA102/06/1624)" . "RIV/68407700:21230/06:00124474!RIV11-GA0-21230___" . "[F66DE6A36C82]" . "RIV/68407700:21230/06:00124474" . . "In the article there is presented a new arrangement of a temperature sensor system for air velocity and direction measurement. The system utilizes temperature dependence of the current through the channel of MOS structure. The geometric arrangement of temperature sensors allows measurement of temperature gradient. Temperature gradient allows to compute direction of air flow over the chip. Optimal operating modes of weak and strong inversion of MOS structure operation have been selected for the design of integrated temperature matrix. The matrix has been used for the design of a probe for measurement. Various arrangements of MOS sensor structures have been designed. CoventorWare and CADENCE software tools have been used for simulation and modeling of sensor properties." . . . "Jakovenko, Ji\u0159\u00ED" . "Nano Science and Technology Institute" . . "Hus\u00E1k, Miroslav" . . "3"^^ . . "Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix"@en . "Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix" . . "4"^^ . . "501870" . . "3"^^ . . . "MOS; flow; sensors; microsystems"@en . "NSTI Nanotech 2006 - Technical Proceedings Vol. 1-3. (CDROM)" . . "2006-05-07+02:00"^^ . . "Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix"@en . "Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix" .