"Jakovenko, Ji\u0159\u00ED" . "Hus\u00E1k, Miroslav" . "[B66E3A6D5479]" . . . . . "WSEAS Press" . . . "Athens" . "468401" . . "2"^^ . . . "Characterization of MEMS sensor for RF Transmitted Power Measurement" . . "RIV/68407700:21230/06:00124084" . . "Characterization of MEMS sensor for RF Transmitted Power Measurement"@en . "Characterization of MEMS sensor for RF Transmitted Power Measurement" . "6"^^ . . "2"^^ . "Z(MSM6840770012)" . . . "Praha" . "Characterization of MEMS sensor for RF Transmitted Power Measurement"@en . "21230" . . "RIV/68407700:21230/06:00124084!RIV11-MSM-21230___" . . . "In this report we introduce the procedure for performing a thermo mechanical design and analysis of thermal GaAs-based MEMS devices. It will provide the procedure how thermal analysis should be made and model equations used to describe conduction, convection, radiation and mechanical effects caused by nonhomogenous temperature distribution."@en . "Thermal Converter; Thermo-mechanical simulations; MEMS; Power sensor; GaAs microsystems"@en . "960-8457-42-4" . . "In this report we introduce the procedure for performing a thermo mechanical design and analysis of thermal GaAs-based MEMS devices. It will provide the procedure how thermal analysis should be made and model equations used to describe conduction, convection, radiation and mechanical effects caused by nonhomogenous temperature distribution." . "2006-03-12+01:00"^^ . "Proceedings of the WSEAS International Conference: 5th WSEAS Int.Conf. on MICROELECTRONICS, NANOELECTRONICS, OPTOELECTRONICS (MINO'06)" . "1790-5117" . .