"Stals, L. M." . "Plasma properties related to TiN deposition are compared in two triode ion-plating systems using a low-voltage arc discharge." . "Surface and Coatings Technology" . . "Ma\u010Dek, M." . . "0"^^ . "Kadlec, Stanislav" . "0"^^ . "Quaeyhaegens, C." . . "CH - \u0160v\u00FDcarsk\u00E1 konfederace" . "0257-8972" . . "8"^^ . "Plasma properties related to TiN deposition are compared in two triode ion-plating systems using a low-voltage arc discharge."@en . . "Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties." . . "P(GV106/96/K245), P(KSK1043601), Z(AV0Z1010914)" . "116-119" . "749596" . "8"^^ . "Navin\u0161ek, B." . . . . "Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties."@en . "Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties."@en . "1211;1218" . "RIV/68378271:_____/99:02000092" . "Panjan, P." . "Wouters, S." . . . "Meert, B." . . "N/A" . . "Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties." . . "[E57B9547CD88]" . "RIV/68378271:_____/99:02000092!RIV/2003/AV0/A02003/N" . . . "1"^^ . "N/A"@en .