"0734-2101" . "RIV/68378271:_____/97:02980342!RIV/2001/AV0/A02001/N" . . . "8"^^ . . "Mi\u0161ina, Martin" . "Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma." . "Journal of Vacuum Science and Technology. A" . . . "1999" . . "Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma."@en . "RIV/68378271:_____/97:02980342" . . "808318" . . . "4" . "Musil, Jind\u0159ich" . "Annotation not available" . "Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma."@en . "Annotation not available"@en . . "P(GV106/96/K245)" . "2"^^ . "3"^^ . "Hovorka, D." . "Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma." . "Mi\u0161ina, Martin" . "[01492068EE90]" . "Musil, Jind\u0159ich" . . "15" . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" .