. "I, P(FR-TI2/736), P(GAP205/12/0908), P(GP14-16549P)" . "Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry" . . . "2164-6627" . . . . "microwave plasma CVD; diamond growth; nitrogen; carbon dioxide; growth rate; SEM"@en . . . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry"@en . . "18660" . "5"^^ . . . "[2F758891E2C6]" . . . . "5"^^ . . . "Diamond films and structures were grown by MWCVD. We show that increasing of CH4 concentration in the gas mixture up to 8% results almost in a linear increasing of growth rate (up to 900 nm/h). Unfortunately, diamond film quality decreases due to the dominance of sp2 carbon phases, as confirmed by Raman measurements. Furthermore, increasing of CH4 concentration also enhances spontaneous nucleation. Addition of N2 and CO2 into CH4/H2 gas mixture also enhances the growth rate. Nitrogen shifts the film morphology from micro- to nanocrystalline. For enough high methane concentration (>5% CH4), increasing of nitrogen further shifts the diamond growth in formation of nanowire like structures. In opposite to the nitrogen addition, adding CO2 to the gas mixture improved the film quality. In this case, a higher methane concentration can be used to increase the growth rate while keeping good enough film quality." . . "6" . . . "RIV/68378271:_____/14:00432636" . . "Diamond films and structures were grown by MWCVD. We show that increasing of CH4 concentration in the gas mixture up to 8% results almost in a linear increasing of growth rate (up to 900 nm/h). Unfortunately, diamond film quality decreases due to the dominance of sp2 carbon phases, as confirmed by Raman measurements. Furthermore, increasing of CH4 concentration also enhances spontaneous nucleation. Addition of N2 and CO2 into CH4/H2 gas mixture also enhances the growth rate. Nitrogen shifts the film morphology from micro- to nanocrystalline. For enough high methane concentration (>5% CH4), increasing of nitrogen further shifts the diamond growth in formation of nanowire like structures. In opposite to the nitrogen addition, adding CO2 to the gas mixture improved the film quality. In this case, a higher methane concentration can be used to increase the growth rate while keeping good enough film quality."@en . "Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry" . "Advanced Science, Engineering and Medicine" . "I\u017E\u00E1k, Tibor" . "Davydova, Marina" . "7"^^ . . "Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry"@en . "I\u017E\u00E1k, Tibor" . "Varga, Mari\u00E1n" . "Potock\u00FD, \u0160t\u011Bp\u00E1n" . . "RIV/68378271:_____/14:00432636!RIV15-GA0-68378271" . "7" . "Kromka, Alexander" . "10.1166/asem.2014.1571" . . .