"Aparatura pro m\u011B\u0159en\u00ED tok\u016F neutr\u00E1ln\u00EDch a ionizovan\u00FDch \u010D\u00E1stic na substr\u00E1t v n\u00EDzkoteplotn\u00EDm plazmatu"@cs . . . . "IONEU2013" . "Ad\u00E1mek, Petr" . "Within the project TA01010517, we have developed a new measuring device enabling to determine deposition rate both neutral or ionized particles reaching substrate. Homogeneous magnetic field at the entrance orifice of the QCM sensor enables effectively suppress electron flux on the quartz sensor."@en . "Aparatura pro m\u011B\u0159en\u00ED tok\u016F neutr\u00E1ln\u00EDch a ionizovan\u00FDch \u010D\u00E1stic na substr\u00E1t v n\u00EDzkoteplotn\u00EDm plazmatu" . "5"^^ . . . . . . "V r\u00E1mci \u0159e\u0161en\u00ED projektu TA01010517 jsme vyvinuli nov\u00E9 m\u011B\u0159\u00EDc\u00ED za\u0159\u00EDzen\u00ED umo\u017E\u0148uj\u00EDc\u00ED stanovit depozi\u010Dn\u00ED rychlost neutr\u00E1ln\u00EDch nebo ionizovan\u00FDch \u010D\u00E1stic dopadaj\u00EDc\u00EDch na substr\u00E1t. Homogenn\u00ED magnetick\u00E9 pole na vstupu QCM sensoru umo\u017E\u0148uje efektivn\u011B potla\u010Dit pr\u016Fnik elektron\u016F do oblasti sensoru."@cs . "5"^^ . . "An apparatus for neutral and ion flux measurement on substrate in a low-temperature plasma"@en . . "Vyvinut\u00E1 aparatura umo\u017E\u0148uje m\u011B\u0159it tok (depozi\u010Dn\u00ED rychlost) neutr\u00E1ln\u00EDch nebo nabit\u00FDch \u010D\u00E1stic na substr\u00E1t. K tomuto \u00FA\u010Delu je vyu\u017Eito QCM \u010Didlo s mo\u017Enost\u00ED p\u0159iveden\u00ED p\u0159edp\u011Bt\u00ED opat\u0159en\u00E9 vhodn\u011B zvolen\u00FDm magneick\u00FDm polem na vstupu QCM \u010Didla" . "I, P(TA01010517)" . . "Aparatura pro m\u011B\u0159en\u00ED tok\u016F neutr\u00E1ln\u00EDch a ionizovan\u00FDch \u010D\u00E1stic na substr\u00E1t v n\u00EDzkoteplotn\u00EDm plazmatu"@cs . "Hubi\u010Dka, Zden\u011Bk" . "RIV/68378271:_____/13:00424549!RIV14-AV0-68378271" . "[05DB300DF25C]" . . "An apparatus for neutral and ion flux measurement on substrate in a low-temperature plasma"@en . . . . "Sn\u00ED\u017Een\u00ED po\u0159izovac\u00EDch n\u00E1klad\u016F na p\u0159\u00EDstrojov\u00E9 vybaven\u00ED." . "Aparatura pro m\u011B\u0159en\u00ED tok\u016F neutr\u00E1ln\u00EDch a ionizovan\u00FDch \u010D\u00E1stic na substr\u00E1t v n\u00EDzkoteplotn\u00EDm plazmatu" . "RIV/68378271:_____/13:00424549" . . "V r\u00E1mci \u0159e\u0161en\u00ED projektu TA01010517 jsme vyvinuli nov\u00E9 m\u011B\u0159\u00EDc\u00ED za\u0159\u00EDzen\u00ED umo\u017E\u0148uj\u00EDc\u00ED stanovit depozi\u010Dn\u00ED rychlost neutr\u00E1ln\u00EDch nebo ionizovan\u00FDch \u010D\u00E1stic dopadaj\u00EDc\u00EDch na substr\u00E1t. Homogenn\u00ED magnetick\u00E9 pole na vstupu QCM sensoru umo\u017E\u0148uje efektivn\u011B potla\u010Dit pr\u016Fnik elektron\u016F do oblasti sensoru." . . . "deposition rate; neutral/ion flux ratio; magnetic field; QCM sensor"@en . "61520" . "Olejn\u00ED\u010Dek, Ji\u0159\u00ED" . . . . "Kment, \u0160t\u011Bp\u00E1n" . . . . "\u010Cada, Martin" . . .