. "4"^^ . . "RIV/68378271:_____/13:00395140!RIV14-MSM-68378271" . . . "6"^^ . . "In situ focus characterization is demonstrated by working at an extreme ultraviolet (XUV) free-electron laser source using ablation technique. Design of the instrument reported here allows reaching a few micrometres resolution along with keeping the ultrahigh vacuum conditions and ensures high-contrast visibility of ablative imprints on optically transparent samples, e.g., PMMA. This enables on-line monitoring of the beam profile changes and thus makes possible in situ alignment of the XUV focusing optics. A good agreement between focal characterizations retrieved from in situ inspection of ablative imprints contours and from well-established accurate ex situ analysis with Nomarski microscope has been observed for a typical micro-focus experiment."@en . . "In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source" . . "free electron lasers; laser ablation; laser beams; optical focusing; ultraviolet sources"@en . . "In situ focus characterization is demonstrated by working at an extreme ultraviolet (XUV) free-electron laser source using ablation technique. Design of the instrument reported here allows reaching a few micrometres resolution along with keeping the ultrahigh vacuum conditions and ensures high-contrast visibility of ablative imprints on optically transparent samples, e.g., PMMA. This enables on-line monitoring of the beam profile changes and thus makes possible in situ alignment of the XUV focusing optics. A good agreement between focal characterizations retrieved from in situ inspection of ablative imprints contours and from well-established accurate ex situ analysis with Nomarski microscope has been observed for a typical micro-focus experiment." . "7"^^ . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . . . "RIV/68378271:_____/13:00395140" . . "[6280D6363353]" . "10.1063/1.4807896" . "84" . "In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source" . "Juha, Libor" . "I, P(ED1.1.00/02.0061), P(EE.2.3.20.0087), P(EE2.3.30.0057), P(GA13-28721S), P(GAP108/11/1312), P(GAP205/11/0571), P(GAP208/10/2302), P(LG13029)" . . "6" . "79385" . . "000321273500050" . . . "Weigelt, H." . . "Vy\u0161\u00EDn, Lud\u011Bk" . "In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source"@en . . . . . "Chalupsk\u00FD, Jarom\u00EDr" . . . "Review of Scientific Instruments" . . . . . "Dziarzhytski, S." . "In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source"@en . "0034-6748" . . "Gerasimova, N." . . "H\u00E1jkov\u00E1, V\u011Bra" . .