. "Linear diagnostic system of the plasma deposition process for large scale depositions was developed. This system is capable to measure spatial distribution of heating flux, ion flux and deposition rate."@en . . "Line\u00E1rn\u00ED diagnostick\u00FD syst\u00E9m plazmov\u00E9 depozice pro velkoplo\u0161n\u00E9 procesy"@cs . . . "Line\u00E1rn\u00ED diagnostick\u00FD syst\u00E9m plazmov\u00E9 depozice pro velkoplo\u0161n\u00E9 procesy"@cs . . . . "Linear diagnostic system of plasma deposition for large scale processes"@en . "Line\u00E1rn\u00ED diagnostick\u00FD syst\u00E9m plazmov\u00E9 depozice pro velkoplo\u0161n\u00E9 procesy" . . . "Olejn\u00ED\u010Dek, Ji\u0159\u00ED" . . . "\u0160m\u00EDd, Ji\u0159\u00ED" . "6"^^ . "Hubi\u010Dka, Zden\u011Bk" . "147131" . "K\u0161\u00EDrov\u00E1, Petra" . "Linear diagnostic system of plasma deposition for large scale processes"@en . . . "\u010Cada, Martin" . . . "6"^^ . . . . . . . . . . "heating flux; plasma; ion flux; deposition; thin films; deposition rate"@en . "Line\u00E1rn\u00ED diagnostick\u00FD syst\u00E9m plazmov\u00E9 depozice pro velkoplo\u0161n\u00E9 procesy" . "Byl realizov\u00E1n line\u00E1rn\u00ED m\u011B\u0159\u00EDc\u00ED syst\u00E9m depozi\u010Dn\u00EDho plazmov\u00E9ho procesu pro velkoplo\u0161n\u00E9 procesy. Ten umo\u017Enil m\u011B\u0159it prostorovou distribuci tepeln\u00E9ho toku, iontov\u00E9ho toku a depozi\u010Dn\u00ED rychlosti"@cs . . "Byl realizov\u00E1n line\u00E1rn\u00ED m\u011B\u0159\u00EDc\u00ED syst\u00E9m depozi\u010Dn\u00EDho plazmov\u00E9ho procesu pro velkoplo\u0161n\u00E9 procesy. Ten umo\u017Enil m\u011B\u0159it prostorovou distribuci tepeln\u00E9ho toku, iontov\u00E9ho toku a depozi\u010Dn\u00ED rychlosti" . "RIV/68378271:_____/12:00390204!RIV13-TA0-68378271" . "RIV/68378271:_____/12:00390204" . "P(TA01011740), Z(AV0Z10100522)" . "V r\u00E1mci projektu TA\u010CR byl vytvo\u0159en m\u011B\u0159\u00EDc\u00ED diagnostick\u00FD syst\u00E9m pro velkoplo\u0161n\u00E9 depozi\u010Dn\u00ED techniky. Tento syst\u00E9m bude sou\u010D\u00E1st\u00ED realizovan\u00E9ho v\u00EDcetryskov\u00E9ho depozi\u010Dn\u00EDho MW syst\u00E9mu." . "[1C5B98E05F9B]" . . "Kment, \u0160t\u011Bp\u00E1n" . . "Typ termo\u010Dl\u00E1nku kalorimetrick\u00E9 sondy-K. Z\u00E1kladn\u00ED frekvence QCM senzoru 5000,00 kHz. Frekven\u010Dn\u00ED rozsah pulzn\u00EDho nap\u011Bt\u00ED pro m\u011B\u0159en\u00ED iontov\u00E9ho toku 50-400 kHz. Frekvence RF zdroje harmonick\u00E9ho nap\u011Bt\u00ED pro m\u011B\u0159en\u00ED iontov\u00E9ho toku 1 MHz Funk\u010Dn\u00ED vzorek byl vytvo\u0159en v r\u00E1mci \u0159e\u0161en\u00ED projektu TA\u010CR TA01011740. Hlavn\u00EDm \u0159e\u0161itelem projektu je firma SVCS (kter\u00E1 m\u00E1 smlouvu s TA\u010CR c. 20110108) a FZU je spolu\u0159e\u0161itelem. Mezi FZU a SVCS je podeps\u00E1na Smlouva o spolupr\u00E1ci, upravuj\u00EDc\u00ED podm\u00EDnky spolupr\u00E1ce p\u0159i p\u0159\u00EDprav\u011B a \u0159e\u0161en\u00ED Projektu a vyu\u017Eit\u00ED v\u00FDsledk\u016F v\u00FDzkumu, kter\u00E1 je nutnou sou\u010D\u00E1st\u00ED \u0159e\u0161en\u00ED projektu. Odpov\u011Bdn\u00FDm \u0159e\u0161itelem za FZ\u00DA je Dr. Kromka. Cislo dokumentace (i pro TACR) i inventarni cislo je totozne s internim kodem: FS3/FZ\u00DA/2012" . . . "FS3/FZ\u00DA/2012" . .