"12" . "Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration" . "10.1143/APEX.4.126401" . "JP - Japonsko" . . "Kr\u00E1sa, Josef" . . . "An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H2 environment during an annealing process at 420\u00B0C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100mA at 1m from the source) and multi-MeV proton beams." . . . "212303" . "Ullschmied, Ji\u0159\u00ED" . "[AF8491A05129]" . "RIV/68378271:_____/11:00376961" . "An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H2 environment during an annealing process at 420\u00B0C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100mA at 1m from the source) and multi-MeV proton beams."@en . . "Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration" . . "3"^^ . "Picciotto, A." . . "000298290500017" . . . "4" . . . . "Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration"@en . "Torrisi, L." . . "Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration"@en . "3"^^ . . . . . . "Crivellari, M." . . . "Margarone, Daniele" . "Applied Physics Express" . . "RIV/68378271:_____/11:00376961!RIV13-GA0-68378271" . "Bellutti, P." . "Colpo, S." . "9"^^ . "P(7E09092), P(ED1.1.00/02.0061), P(EE.2.3.20.0087), P(GAP205/11/1165), Z(AV0Z10100523), Z(AV0Z20430508)" . "Velyhan, Andriy" . . "silicon microfabrication; hydrogenated targets; lasers; proton acceleration"@en . "1882-0778" . "Margarone, Daniele" . .