"203063" . "Hybridn\u00ED plazmatick\u00FD pulzn\u00ED HIPIMS+MF syst\u00E9m pro reaktivn\u00ED napra\u0161ov\u00E1n\u00ED optick\u00FDch tenk\u00FDch vrstev pro laboratorn\u00ED a testovac\u00ED \u00FA\u010Dely"@cs . "Kment, \u0160t\u011Bp\u00E1n" . . . . "Dejneka, Alexandr" . . . . "P(TA01010517), Z(AV0Z10100522)" . "[440B82E65CF5]" . . . . . . "Magnetronov\u00E9 d\u011Blo M1, M2- rozm\u011Br ter\u010De: 50 mm. Maxim\u00E1ln\u00ED v\u00FDstupn\u00ED nap\u011Bt\u00ED HIPIMS zdroje: 1000 V Maxim\u00E1ln\u00ED proud v pulzu HIPIMS zdroje: 200 A Maxim\u00E1ln\u00ED st\u0159edn\u00ED proud magnetronem: 1A" . . . "Hybridn\u00ED plazmatick\u00FD pulzn\u00ED HIPIMS+MF syst\u00E9m pro reaktivn\u00ED napra\u0161ov\u00E1n\u00ED optick\u00FDch tenk\u00FDch vrstev pro laboratorn\u00ED a testovac\u00ED \u00FA\u010Dely" . "Stra\u0148\u00E1k, V\u00EDt\u011Bzslav" . "Sekce optika, Odd\u011Blen\u00ED n\u00EDzkoteplotn\u00EDho plazmatu, FZ\u00DA AV \u010CR, v.v" . . . "Hybridn\u00ED plazmatick\u00FD pulzn\u00ED HIPIMS+MF syst\u00E9m pro reaktivn\u00ED napra\u0161ov\u00E1n\u00ED optick\u00FDch tenk\u00FDch vrstev pro laboratorn\u00ED a testovac\u00ED \u00FA\u010Dely"@cs . "\u010Cada, Martin" . "Hubi\u010Dka, Zden\u011Bk" . . "RIV/68378271:_____/11:00371285" . "Jastrab\u00EDk, Lubom\u00EDr" . . "V r\u00E1mci \u0159e\u0161en\u00ED projektu TA\u010CR jsme vyvinuli hybridn\u00ED plazmatick\u00FD syst\u00E9m se dv\u011Bma magnetrony a syst\u00E9mem dut\u00E9 katody, kter\u00FD je ur\u010Den pro pulzn\u00ED HIPIMS+MF reaktivn\u00ED napra\u0161ov\u00E1n\u00ED optick\u00FDch tenk\u00FDch vrstev pro laboratorn\u00ED a testovac\u00ED \u00FA\u010Dely." . . . "V r\u00E1mci \u0159e\u0161en\u00ED projektu TA\u010CR jsme vyvinuli hybridn\u00ED plazmatick\u00FD syst\u00E9m se dv\u011Bma magnetrony a syst\u00E9mem dut\u00E9 katody, kter\u00FD je ur\u010Den pro pulzn\u00ED HIPIMS+MF reaktivn\u00ED napra\u0161ov\u00E1n\u00ED optick\u00FDch tenk\u00FDch vrstev pro laboratorn\u00ED a testovac\u00ED \u00FA\u010Dely."@cs . "Hybrid plasmatic system was developed in frame of grant TACR. The system contains two magnetrons and the hollow cathode system for HIPIMS+MF reactive sputtering of optical thin films. The system is suitable for research purposes."@en . "7"^^ . "Laboratorn\u00ED za\u0159\u00EDzen\u00ED nezbytn\u00E9 pro dal\u0161\u00ED aplikovan\u00FD v\u00FDzkum" . . . . . . "Hybrid plasmatic pulse system HIPIMS+MF for reactive sputtering of optical thin films for laboratory and research purposes"@en . . . "sputtering; optical thin films; plasma; deposition; magnetron; hollow cathode"@en . "Dejneka, Alexandr" . "RIV/68378271:_____/11:00371285!RIV12-AV0-68378271" . . "Hybridn\u00ED plazmatick\u00FD pulzn\u00ED HIPIMS+MF syst\u00E9m pro reaktivn\u00ED napra\u0161ov\u00E1n\u00ED optick\u00FDch tenk\u00FDch vrstev pro laboratorn\u00ED a testovac\u00ED \u00FA\u010Dely" . . "7"^^ . "Hybrid plasmatic pulse system HIPIMS+MF for reactive sputtering of optical thin films for laboratory and research purposes"@en . . . "FS1/FZ\u00DA/2011" . "\u0160m\u00EDd, Ji\u0159\u00ED" .