. "Measurement of total energy flux density at a substrate during TiOx thin film deposition by using a plasma jet system" . "000261824400008" . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" . "0042-207X" . . . "325080" . "Measurement of total energy flux density at a substrate during TiOx thin film deposition by using a plasma jet system"@en . "Hubi\u010Dka, Zden\u011Bk" . . "Virostko, Petr" . . . "[191BC26B7749]" . "P(KAN301370701), P(KJB100100707), Z(AV0Z10100522)" . . . "Measurement of total energy flux density at a substrate during TiOx thin film deposition by using a plasma jet system"@en . "Kment, \u0160t\u011Bp\u00E1n" . . . "4" . "Measurement of total energy flux density at a substrate during TiOx thin film deposition by using a plasma jet system" . "The total energy flux density delivered to an electrically isolated substrate in a low-pressure pulsed DC hollow cathode plasma jet sputtering system during TiO2 thin film deposition has been quantified. The plasma source was operated in constant average current mode and in a mixture of argon and oxygen or only in pure argon working gas. A titanium nozzle served as the hollow cathode. The total energy flux density measurements were made using a planar calorimeter probe. The main results from the calorimeter probe showed clearly that the total energy flux density at the electrically isolated substrate decreases significantly with duty cycle from 100% (DC mode) to 10% at a given pulsing frequency 2.5 kHz."@en . "hollow cathode; plasma jet; sputtering; pulsed DC; energy influx on substrate; TiO2"@en . "\u010Cada, Martin" . "4"^^ . . . "RIV/68378271:_____/09:00334316" . "Vacuum" . . "4"^^ . . . . . . . . . . "The total energy flux density delivered to an electrically isolated substrate in a low-pressure pulsed DC hollow cathode plasma jet sputtering system during TiO2 thin film deposition has been quantified. The plasma source was operated in constant average current mode and in a mixture of argon and oxygen or only in pure argon working gas. A titanium nozzle served as the hollow cathode. The total energy flux density measurements were made using a planar calorimeter probe. The main results from the calorimeter probe showed clearly that the total energy flux density at the electrically isolated substrate decreases significantly with duty cycle from 100% (DC mode) to 10% at a given pulsing frequency 2.5 kHz." . "7"^^ . . . "83" . "RIV/68378271:_____/09:00334316!RIV10-AV0-68378271" .