. "4"^^ . "St\u00F6rmer, M." . "P(IAA400100701), P(KAN300100702), P(LA08024), P(LC510), P(LC528), Z(AV0Z10100523)" . . . "Reale, A." . . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "RIV/68378271:_____/09:00334101" . . "Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold" . "105" . "Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold"@en . . . . . "9" . "single-shot damage threshold; multiple-shot exposure damage; amorphous carbon; radiation erosion; capillary-discharge XUV laser"@en . . . "8"^^ . "Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold"@en . . . . . "Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold" . . . . "RIV/68378271:_____/09:00334101!RIV10-MSM-68378271" . . "High-surface-quality amorphous carbon (a-C) optical coatings with a thickness of 45 nm, deposited by magnetron sputtering on a silicon substrate, were irradiated by the 46.9 nm focused beam of capillary-discharge Ne-like Ar extreme ultraviolet laser. It has been found that an accumulation of 10, 20, and 40 shots at a fluence of 0.5 J/cm(2), i.e., below the single-shot damage threshold, causes irreversible changes of thin a-C layers, which can be registered by both the AFM and the DIC microscopy. In the center of the damaged area, AFM shows a-C removal to a maximum depth of 0.3, 1.2, and 1.5 nm for 10-, 20-and 40-shot exposure, respectively."@en . . "Juha, Libor" . "000266263300018" . "[D081D45333D6]" . "Vorl\u00ED\u010Dek, Vladim\u00EDr" . . "Zuppella, P." . "High-surface-quality amorphous carbon (a-C) optical coatings with a thickness of 45 nm, deposited by magnetron sputtering on a silicon substrate, were irradiated by the 46.9 nm focused beam of capillary-discharge Ne-like Ar extreme ultraviolet laser. It has been found that an accumulation of 10, 20, and 40 shots at a fluence of 0.5 J/cm(2), i.e., below the single-shot damage threshold, causes irreversible changes of thin a-C layers, which can be registered by both the AFM and the DIC microscopy. In the center of the damaged area, AFM shows a-C removal to a maximum depth of 0.3, 1.2, and 1.5 nm for 10-, 20-and 40-shot exposure, respectively." . . . . "H\u00E1jkov\u00E1, V\u011Bra" . "Chalupsk\u00FD, Jarom\u00EDr" . "0021-8979" . "Ritucci, A." . "Journal of Applied Physics" . "6"^^ . "337961" . . .