. "P(GA202/06/0216), P(GA202/07/0591), S, Z(AV0Z10100521), Z(AV0Z10100522)" . "2" . . "Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings." . . . "318084" . "1054-660X" . . . "[F4525D9B3D62]" . . . "SiC; thin films; PLD; hybrid deposition; composites"@en . . "Jel\u00EDnek, Miroslav" . . "Zemek, Josef" . "5"^^ . "Kadlec, J." . "Hybrid laser - magnetron technology for carbon composite coating" . . "Hybrid laser - magnetron technology for carbon composite coating"@en . . . . "Kocourek, Tom\u00E1\u0161" . "RIV/68378271:_____/09:00330295" . . "Hybrid laser - magnetron technology for carbon composite coating"@en . "3"^^ . "19" . . . "RU - Rusk\u00E1 federace" . "4"^^ . "Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings."@en . "RIV/68378271:_____/09:00330295!RIV10-AV0-68378271" . . . "Hybrid laser - magnetron technology for carbon composite coating" . . "Laser Physics" . . "000263260200001" . . . .