. "TECON Scientific" . "378155" . . . . "Chmel\u00ED\u010Dkov\u00E1, Hana" . . . "Ro\u017Enov pod Radho\u0161t\u011Bm" . "Ro\u017Enov pod Radho\u0161t\u011Bm" . . . . "978-80-254-3278-5" . "The form of silicon wafer is measured by white-light interferometry with measurement uncertainty about 1 \u03BCm. In this way waviness or deviations of the silicon wafers can be measured." . "[9E92E5FC689C]" . . "Me\u0159en\u00ED tvaru k\u0159em\u00EDkov\u00FDch desek pomoc\u00ED interferometrie v b\u00EDl\u00E9m sv\u011Btle"@cs . "RIV/68378271:_____/08:00321023" . . . "SILICON 2008. 11th Scientific and Business Conference" . "Me\u0159en\u00ED tvaru k\u0159em\u00EDkov\u00FDch desek pomoc\u00ED interferometrie v b\u00EDl\u00E9m sv\u011Btle"@cs . "The form of silicon wafer is measured by white-light interferometry with measurement uncertainty about 1 \u03BCm. In this way waviness or deviations of the silicon wafers can be measured."@en . "RIV/68378271:_____/08:00321023!RIV09-AV0-68378271" . "2"^^ . "2008-11-04+01:00"^^ . . . . . "Measurement of the form of silicon wafers by white-light interferometry" . . "2"^^ . "Tvar k\u0159em\u00EDkov\u00FDch desek je m\u011B\u0159ena pomoc\u00ED interferometrie v b\u00EDl\u00E9m sv\u011Btle s nejistotou p\u0159ibli\u017En\u011B 1 \u03BCm. T\u00EDmto zp\u016Fsobem je mo\u017En\u00E9 m\u011B\u0159it zvln\u011Bn\u00ED nebo odchylky k\u0159em\u00EDkov\u00FDch desek."@cs . "Measurement of the form of silicon wafers by white-light interferometry"@en . "Pavl\u00ED\u010Dek, Pavel" . . . . "Measurement of the form of silicon wafers by white-light interferometry"@en . "5"^^ . "P(KAN301370701), Z(AV0Z10100522), Z(MSM6198959213)" . . "white light interferometry; waviness; form; silicon wafer"@en . "Measurement of the form of silicon wafers by white-light interferometry" .