. . . . "Vorl\u00ED\u010Dek, Vladim\u00EDr" . "Vod\u00EDkuprost\u00E9 amorfn\u00ED a nanokrystalick\u00E9 filmy byly p\u0159ipraveny magnetronov\u00FDm rozpra\u0161ov\u00E1n\u00EDm Target\u016F SiC a Si. V z\u00E1vislosti na %22bias%22 a teplot\u011B substr\u00E1t\u016F byly zkoum\u00E1ny jejich mechanick\u00E9 vlastnosti (tvrdost, modul pru\u017Enosti, vnit\u0159n\u00ED pnut\u00ED). Bylo zji\u0161t\u011Bno, \u017Ee tvrdost a modul pru\u017Enosti v\u0161ech amorfn\u00EDch a-SiC film\u016F byl men\u0161\u00ED ne\u017E pro %22bulk%22 \u03B1-SiC monokrystalu. \u010C\u00E1ste\u010Dn\u011B krystalick\u00E9 filmy SiC m\u011Bly vy\u0161\u0161\u00ED tvrdost a ni\u017E\u0161\u00ED modul pru\u017Enosti ne\u017E \u03B1-SiC. Naproti tomu amorfn\u00ED filmy Si m\u011Bly v\u0161echny tvrdost a modul pru\u017Enosti ni\u017E\u0161\u00ED ne\u017E Si filmy nanokrystalick\u00E9, kter\u00E9 vyk\u00E1zaly p\u0159ibli\u017En\u011B tyt\u00E9\u017E hodnoty jako monokrystal Si."@cs . "Boh\u00E1\u010D, Petr" . . . "RIV/68378271:_____/08:00307730!RIV08-AV0-68378271" . "Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films" . . "1738;1745" . "0257-8972" . . "Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films" . . "-" . . "Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films"@en . . "6"^^ . "Surface and Coatings Technology" . . "7"^^ . . "RIV/68378271:_____/08:00307730" . . "\u010Ctvrtl\u00EDk, Radim" . "202" . . "[35C429E7CF45]" . . "sputtering; hardness; nanocrystalline SiC films; nanocomposites; amorphous"@en . . "Tvrdost a modul pru\u017Enosti amorfn\u00EDch a nanokrystalick\u00FDch film\u016F SiC a Si"@cs . "Tvrdost a modul pru\u017Enosti amorfn\u00EDch a nanokrystalick\u00FDch film\u016F SiC a Si"@cs . . "Strany\u00E1nek, Martin" . . . . "P(1M06002), P(OC 095), P(OC 097), Z(AV0Z10100522)" . "CH - \u0160v\u00FDcarsk\u00E1 konfederace" . "369804" . "8"^^ . "Hydrogen-free amorphous and nanocrystalline films were prepared by magnetron sputtering of the SiC or Si targets. Mechanical properties (hardness, elastic modulus, intrinsic stress) and film structures were investigated in dependence on the substrate bias and temperature. It was found that both hardness and elastic modulus of all amorphous a-SiC films prepared at different substrate temperatures and biases are always lower than those for bulk \u03B1-SiC single crystal while the hardness of partially crystalline SiC films is higher and the elastic modulus lower than those for \u03B1-SiC one. In contrast, both hardness and elastic modulus of all amorphous Si films are always lower than those for nanocrystalline Si films which show approximately the same value as the Si single crystal." . . . "Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films"@en . . . "Hydrogen-free amorphous and nanocrystalline films were prepared by magnetron sputtering of the SiC or Si targets. Mechanical properties (hardness, elastic modulus, intrinsic stress) and film structures were investigated in dependence on the substrate bias and temperature. It was found that both hardness and elastic modulus of all amorphous a-SiC films prepared at different substrate temperatures and biases are always lower than those for bulk \u03B1-SiC single crystal while the hardness of partially crystalline SiC films is higher and the elastic modulus lower than those for \u03B1-SiC one. In contrast, both hardness and elastic modulus of all amorphous Si films are always lower than those for nanocrystalline Si films which show approximately the same value as the Si single crystal."@en . . "Kurdyumov, A." . "Kulykovskyy, Valeriy" . "Jastrab\u00EDk, Lubom\u00EDr" .