. . . . "-" . "DE - Spolkov\u00E1 republika N\u011Bmecko" . . "[977D6ED12330]" . "5"^^ . . . "407828" . "RIV/68378271:_____/07:00309732!RIV08-AV0-68378271" . . . . . . "laser ablation; magnetron sputtering; optical emission spectroscopy"@en . "Plasma Processes and Polymers" . . . . . "A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems" . "Bul\u00ED\u0159, Ji\u0159\u00ED" . "Lan\u010Dok, J\u00E1n" . . . "Novotn\u00FD, Michal" . "Time- and spatially resolved optical emission spectroscopy was performed to characterize the plasma produced in a pulsed laser deposition and a hybrid magnetron sputtering-pulsed laser deposition systems suitable for SiC thin films preparation." . . . "P(GA202/06/0216), P(KJB1010417), Z(AV0Z10100522)" . "A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems"@en . . "Time- and spatially resolved optical emission spectroscopy was performed to characterize the plasma produced in a pulsed laser deposition and a hybrid magnetron sputtering-pulsed laser deposition systems suitable for SiC thin films preparation."@en . "\u010Casov\u011B a prostorov\u011B rozli\u0161en\u00E1 optick\u00E1 emisn\u00ED spektroskopie byla vyu\u017Eita pro studium plazmatu v depozi\u010Dn\u00EDch syst\u00E9mech pro p\u0159\u00EDpravu SiC vrstev. Jedn\u00E1 se o syst\u00E9my s pulsn\u00ED laserovou depozic\u00ED a hybridn\u00ED s kombinac\u00ED magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED a pulsn\u00ED laserov\u00E9 depozice."@cs . "Srovn\u00E1n\u00ED plazmatu v laserov\u00FDch a hybridn\u00EDch laser-magnetronov\u00FDch syst\u00E9mech pro p\u0159\u00EDpravu SiC"@cs . "S1017;S1021" . "4" . "1612-8850" . "4"^^ . "Srovn\u00E1n\u00ED plazmatu v laserov\u00FDch a hybridn\u00EDch laser-magnetronov\u00FDch syst\u00E9mech pro p\u0159\u00EDpravu SiC"@cs . "RIV/68378271:_____/07:00309732" . "4"^^ . "Jel\u00EDnek, Miroslav" . "A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems" . "A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems"@en .